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Hiroya Ohta

Canon Inc.

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Publication

Featured researches published by Hiroya Ohta.

Archive | 2002

Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same

Hiroya Ohta; Yasunari Sohda; Norio Saitou; Haruo Yoda; Yoshikiyo Yui; Shin apos Ichi Hashimoto

Archive | 2005

Measurement method of electron beam current, electron beam writing system and electron beam detector

Makoto Sakakibara; Yoshinori Nakayama; Hiroya Ohta; Yasunari Sohda; Noriyuki Tanaka; Yasuhiro Someda

Archive | 2004

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Masato Muraki; Yoshinori Nakayama; Hiroya Ohta; Haruo Yoda; Norio Saitou

Archive | 2002

Exposure apparatus, control method thereof, and device manufacturing method

Masato Muraki; Hiroya Ohta; Shinichi Hashimoto

Archive | 2005

Multi-electron beam exposure method and apparatus

Haruo Yoda; Yasunari Souda; Hiroya Ohta; Yoshikiyo Yui; Shinichi Hashimoto

Archive | 2006

Aberration adjusting method, device fabrication method, and charged particle beam lithography machine

Masato Muraki; Hiroya Ohta

Archive | 2004

Electron beam source and electron beam exposure apparatus employing the electron beam source

Yoshikiyo Yui; Hiroya Ohta

Archive | 2004

Electron beam writing equipment and electron beam writing method

Yasunari Sohda; Hiroya Ohta; Osamu Kamimura; Susumu Gotoh

Archive | 2006

Electron beam writing system and electron beam writing method

Yoshinori Nakayama; Hiroya Ohta; Makoto Sakakibara; Yasunari Sohda; Masaki Hosoda

Archive | 2004

Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus

Masato Muraki; Hiroya Ohta; Osamu Kamimura

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Collaboration

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Masato Muraki

Canon Inc.

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Yasunari Sohda

Canon Inc.

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Haruo Yoda

Canon Inc.

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Osamu Kamimura

Canon Inc.

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Yoshikiyo Yui

Canon Inc.

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Yoshinori Nakayama

Canon Inc.

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Makoto Sakakibara

Canon Inc.

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Norio Saitou

Canon Inc.

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Shinichi Hashimoto

Canon Inc.

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Susumu Gotoh

Canon Inc.

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