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Haruo Yoda

Canon Inc.

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Publication

Featured researches published by Haruo Yoda.

Archive | 2007

Charged particle beam exposure apparatus

Masato Muraki; Haruo Yoda

Archive | 2004

Method of charged particle beam lithography and equipment for charged particle beam lithography

Sayaka Tanimoto; Yasunari Sohda; Yoshinori Nakayama; Osamu Kamimura; Haruo Yoda; Masaki Hosoda

Archive | 2002

Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same

Hiroya Ohta; Yasunari Sohda; Norio Saitou; Haruo Yoda; Yoshikiyo Yui; Shin apos Ichi Hashimoto

Archive | 2009

PHOTOACOUSTIC IMAGING APPARATUS

Haruo Yoda

Archive | 2004

Charged particle beam exposure method and apparatus and device manufacturing method using the apparatus

Masato Muraki; Yoshinori Nakayama; Hiroya Ohta; Haruo Yoda; Norio Saitou

Archive | 2009

Received data processing apparatus of photoacoustic tomography

Yoshitaka Baba; Haruo Yoda; Kazuhiko Fukutani

Archive | 2005

Multi-electron beam exposure method and apparatus

Haruo Yoda; Yasunari Souda; Hiroya Ohta; Yoshikiyo Yui; Shinichi Hashimoto

Archive | 2004

Charged particle beam exposure method, charged particle beam exposure apparatus, and device manufacturing method

Masato Muraki; Haruo Yoda

Archive | 2005

Charged particle beam drawing apparatus

Yuji Inoue; Haruo Yoda; Kimiaki Ando; Yoshikiyo Yui

Archive | 2011

Acoustic wave imaging apparatus and acoustic wave imaging method

Haruo Yoda; Kenichi Nagae

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Collaboration

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Masato Muraki

Canon Inc.

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Shinichi Hashimoto

Canon Inc.

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Hiroya Ohta

Canon Inc.

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Yasunari Sohda

Canon Inc.

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Yoshikiyo Yui

Canon Inc.

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Yoshinori Nakayama

Canon Inc.

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Katsuya Oikawa

Canon Inc.

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Kimiaki Ando

Canon Inc.

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Masaki Hosoda

Canon Inc.

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Norio Saitou

Canon Inc.

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