Yasuo Matsuoka
Toshiba
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Featured researches published by Yasuo Matsuoka.
Proceedings of SPIE | 2008
Kohji Hashimoto; Satoshi Usui; Kenji Yoshida; Ichirota Nagahama; Osamu Nagano; Yasuo Matsuoka; Yuuichiro Yamazaki; Soichi Inoue
We constructed hot spot management flow with a die-to-database inspection system that is required for both hot spot extraction accuracy and short development turn-around-time (TAT) in low k1 lithography. The die-to-database inspection system, NGR-2100, has remarkable features for the full chip inspection within reasonable operating time. The system provided higher hot spot extraction accuracy than the conventional optical inspection tool. Also, hot spots extracted by the system could cover all killer hot spots extracted by electrical and physical analysis. In addition, the new hot spot extraction methodology employing the die-to-database inspection system is highly advantageous in that it shortens development TAT by two to four months. In the application to 65nm node CMOS, we verified yield improvement with the new hot spot management flow. Also, the die-to-database inspection system demonstrated excellent interlayer hot spot extraction from the viewpoint of LSI fabrication.
Archive | 1986
Takashi Tsuchiya; Yasuo Matsuoka
Archive | 1986
Yasuo Matsuoka; Kinya Usuda; Michiro Takano
Archive | 1996
Katsuhisa Mita; Yasuo Matsuoka; Kenichi Taniyama; Michirou Takano; Tsuneo Akasaki; Kaoru Kanda
Archive | 1991
Yasuo Matsuoka
Archive | 1988
Noboru Yamamoto; Yasuo Matsuoka
Archive | 1986
Hiroyuki Hasebe; Masayuki Suzuki; Yasuo Matsuoka; Takashi Tsuchiya; Kinya Usuda
Archive | 1998
Katsuhisa Mita; Yasuo Matsuoka; Kenichi Taniyama; Michirou Takano; Tsuneo Akasaki; Kaoru Kanda
Archive | 2011
Yasuo Matsuoka; Ryoichi Inanami; Akiko Mimotogi
Archive | 1986
Yasuo Matsuoka
