Yasutaka Kohno

Method of manufacturing a field effect transistor with a T-shaped gate electrode and reduced capacitance

Method of making asymmetrical gate field effect transistor

Light ozone asher,light ashing method,and manufacturing method of semiconductor device

Method for producing refractory metal gate electrode

Semiconductor device with reduced stress on gate electrode

Field effect transistor and method for producing the field effect transistor

Semiconductor device electrode

METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE

Method of producing a semiconductor device using electron cyclotron resonance plasma CVD and substrate biasing

Recessed gate field effect transistor