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Yi-Nien Su

TSMC

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Publication

Featured researches published by Yi-Nien Su.

Archive | 2004

Air gap interconnect structure and method thereof

Yi-Nien Su; Jyu-Horng Shieh

Archive | 2005

Contact hole structures and contact structures and fabrication methods thereof

Ju-Wang Hsu; Jyu-Horng Shieh; Yi-Nien Su; Peng-Fu Hsu; Hun-Jan Tao

Archive | 2004

DUAL DAMASCENE STRUCTURE FORMED OF LOW-K DIELECTRIC MATERIALS

Yi-Nien Su; Jyu-Horng Shieh

Archive | 2007

Fin filled effect transistor and method of forming the same

Ju-Wang Hsu; Chih-Yuan Ting; Tang-Xuan Zhong; Yi-Nien Su; Jang-Shiang Tsai

Archive | 2005

Dual damascene interconnect in hybrid dielectric

Yi-Nien Su; Jyu-Horng Shieh; Hun-Jan Tao

Archive | 2004

Low oxygen content photoresist stripping process for low dielectric constant materials

Jyu-Horng Shieh; Yi-Nien Su; Jang-Shiang Tsai; Chen-Nan Yeh; Hun-Jan Tao

Archive | 2005

Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereof

Yi-chen Huang; Chien Chung Fu; Ming-hong Hsieh; Hui Ouyang; Yi-Nien Su; Hun-Jan Tao

Archive | 2004

Method for photoresist stripping and treatment of low-k dielectric material

Jang-Shiang Tsai; Yi-Nien Su; Chung-Chi Ko; Jyu-Horng Shieh; Peng-Fu Hsu; Hun-Jan Tao

Archive | 2006

Forming a dual damascene structure without ashing-damaged ultra-low-k intermetal dielectric

Jyu-Horng Shieh; Yi-Nien Su

Archive | 2004

Method of making dual damascene with via etch through

Yi-Nien Su; Yi-Chen Huang; Jyu-Horng Shieh

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Collaboration

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Jyu-Horng Shieh

TSMC

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Hun-Jan Tao

TSMC

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Jang-Shiang Tsai

TSMC

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Ju-Wang Hsu

TSMC

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Peng-Fu Hsu

TSMC

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Chien Chung Fu

TSMC

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Chih-Yuan Ting

TSMC

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Hui Ouyang

TSMC

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Ming-hong Hsieh

TSMC

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Tang-Xuan Zhong

TSMC

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