Yi-Shao Liu
TSMC
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Publication
Featured researches published by Yi-Shao Liu.
international conference on solid-state sensors, actuators and microsystems | 2011
Cm Liu; Bruce C. S. Chou; Robert Chin-Fu Tsai; Nick Y.M. Shen; Benior Sf Chen; Emerson Cheng; Hsiao Chin Tuan; Alex Kalnitsky; Sean Cheng; Chung-Hsien Lin; Tien-Kan Chung; Kuei-Sung Chang; Yi-Shao Liu
MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
Archive | 2014
Yi-Shao Liu; Chun-Ren Cheng; Ching-Ray Chen; Yi-Hsien Chang; Fei-Lung Lai; Chun-Wen Cheng
Archive | 2012
Alexander Kalnitsky; Yi-Shao Liu; Kai-Chih Liang; Chia-Hua Chu; Chun-Ren Cheng; Chun-Wen Cheng
Archive | 2013
Chia-Hua Chu; Allen Timothy Chang; Ching-Ray Chen; Yi-Hsien Chang; Yi-Shao Liu; Chun-Ren Cheng; Chun-Wen Cheng
Archive | 2013
Wei-Cheng Shen; Yi-Shao Liu; Yi-Hsien Chang; Chun-Ren Cheng
Archive | 2014
Allen Timothy Chang; Yi-Shao Liu; Ching-Ray Chen; Chun-Ren Cheng
Archive | 2013
Yi-Shao Liu; Chun-Ren Cheng; Chun-Wen Cheng
Archive | 2017
Yi-Shao Liu; Rashid Bashir; Fei-Lung Lai; Chun-Wen Cheng
Archive | 2016
Yi-Shao Liu; Emerson Cheng; Yi-Hsien Chang; Chun-Ren Cheng; Ching-Ray Chen; Alex Kalnitsky; Allen Timothy Chang
Archive | 2013
Ching-Ray Chen; Yi-Shao Liu; Chun-Ren Cheng; Chun-Wen Cheng; Chia-Hua Chu; Allen Timothy Chang; Yi-Hsien Chang
