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Dive into the research topics where Yoshiharu Ota is active.

Publication


Featured researches published by Yoshiharu Ota.


Archive | 2011

Cleaning device and coating device for slit nozzle

Kimio Motoda; Fumihiro Miyazaki; Yoshiharu Ota; Takuo Kawauchi


Archive | 2001

Coating film forming method and coating apparatus

Yoshiharu Ota


Archive | 1998

Scrubbing apparatus and scrubbing method

Kimio Motoda; Yoshiharu Ota; Norio Uchihira; Kiyohisa Tateyama


Archive | 2005

APPLICATION PROCESSOR AND APPLICATION PROCESSING METHOD

Yoshiharu Ota; 義治 太田


Archive | 2000

SUBSTRATE CONVEYING APPARATUS

Yoshiharu Ota; Keisuu Otsuka; 慶崇 大塚; 義治 太田


Archive | 2008

Substrate transporting and processing apparatus

Kimio Motoda; Yoshiharu Ota; Masaya Shinozaki; 公男 元田; 義治 太田; 賢哉 篠崎


Archive | 1999

Interlock apparatus for a transfer machine

Yoshiharu Ota; Masaaki Yoshida; Shinya Tanoue; Tatsuya Iwasaki


Archive | 2005

System and method for processing application drying

Kimio Motoda; Yoshiharu Ota; 公男 元田; 義治 太田


Archive | 1999

HEATER AND SUBSTRATE HEATER

Yoshiharu Ota; 義治 太田


Archive | 1995

Conveying device for material to be treated

Tatsuya Iwasaki; Yoshiharu Ota; Kiyohisa Tateyama; 義治 太田; 達也 岩▲崎▼; 清久 立山

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