Kiyohisa Tateyama
Tokyo Electron
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Publication
Featured researches published by Kiyohisa Tateyama.
Robotics and Computer-integrated Manufacturing | 1993
Kiyohisa Tateyama; Masami Akimoto; Mitsuru Ushijima
A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage, and a waiting unit for temporarily holding the wafer which is to be processed. The waiting unit is arranged beside the passage and between the process units and it includes plural compartments partitioned in it.
Archive | 1994
Kiyohisa Tateyama; Masami Akimoto; Mitsuru Ushijima
Archive | 1993
Kiyohisa Tateyama; Michiaki Matsushita
Archive | 1999
Kiyohisa Tateyama; Kimio Motoda; Noriyuki Anai
Archive | 1995
Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi
Archive | 1996
Tetsuya Sada; Osamu Hirose; Kiyohisa Tateyama
Archive | 1995
Tetu Ohsawa; Kiyohisa Tateyama
Archive | 1993
Keizo Hasebe; Kiyohisa Tateyama; Yuji Yoshimoto; Yuji Matsuyama; Tetsuro Nakahara; Yoshio Kimura
Archive | 1995
Kimio Motoda; Kiyohisa Tateyama
Archive | 1995
Kiyohisa Tateyama; Kimio Motoda; Kenji Sekiguchi; Tsutae Omori
