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Dive into the research topics where Tatsuya Iwasaki is active.

Publication


Featured researches published by Tatsuya Iwasaki.


Archive | 1995

Resist processing apparatus for a rectangular substrate

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi


Archive | 1999

Conveying unit and substrate processing unit

Shinya Tanoue; Shinichiro Araki; Tatsuya Iwasaki; Eiichiro Kamada


Archive | 1999

Substrate conveying device and substrate conveying method

Kiyohisa Tateyama; Tatsuya Iwasaki


Archive | 1993

Device and method for scrubbing and cleaning substrate

Kouichi Tanoue; Shinzi Kitamura; Noriyuki Anai; Takami Satoh; Takayuki Tomoeda; Tatsuya Iwasaki; Kengo Mizosaki


Archive | 1994

Method for scrubbing and cleaning substrate

Kouichi Tanoue; Shinzi Kitamura; Noriyuki Anai; Takami Satoh; Takayuki Tomoeda; Tatsuya Iwasaki; Kengo Mizosaki


Archive | 2003

Substrate alignment apparatus, substrate processing apparatus, and substrate transfer apparatus

Tatsuya Iwasaki; Kimio Motoda; Kiyohisa Tateyama; 公男 元田; 達也 岩崎; 清久 立山


Archive | 2004

Substrate calibrating appts, its processing device and delivery appts.

Kiyohida Tateyama; Kimio Motoda; Tatsuya Iwasaki


Archive | 1997

Resist processing method and apparatus

Kiyohisa Tateyama; Kimio Motoda; Tatsuya Iwasaki; Takenobu Matsuo; Kazuki Denpoh; Eiji Yamaguchi


Archive | 2002

Substrate carrier, substrate treatment unit and method for carrying substrate

Shinya Hayashi; Tatsuya Iwasaki; Noritoshi Kumagai; Keisuu Otsuka; Norihide Sagara; Shinya Tagami; 慶崇 大塚; 達也 岩崎; 伸也 林; 典俊 熊谷; 真也 田上; 典秀 相良


Archive | 1998

Substrate treatment device and substrate transporting method

Tatsuya Iwasaki; Kiyohisa Tateyama

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