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Featured researches published by Young-Geun Park.


SID Symposium Digest of Technical Papers | 2000

42.1: A Novel Four-Mask-Count Process Architecture for TFT-LCDs

Chi-Woo Kim; Young-Geun Park; Hyang-Shik Kong; Dong-Gyu Kim; Sun-Ho Kang; J. W. Jang; Sunkwon Kim

High production cost of the TFT-LCDs is closely related to the complication of the fabrication process. To simplify the fabrication process, it is critical to reduce the number of mask-count. In this paper, 4-mask-count TFT-array process using slit (or gray-tone) photolithography technology is introduced. Various kinds of the geometrical slit designs and the exposure conditions have been simulated and experimentally optimized. By adopting this novel process, TFT channel is defined without using additional photolithography.


Archive | 2005

Trench capacitors with insulating layer collars in undercut regions and method of fabricating the same

Suk-Jin Chung; Seung-Hwan Lee; Sung-tae Kim; Young-sun Kim; Jae-soon Lim; Young-Geun Park


Archive | 2005

Methods of forming a capacitor using an atomic layer deposition process

Jae-soon Lim; Sung-Tae Kim; Young-sun Kim; Young-Geun Park; Suk-Jin Chung; Seung-Hwan Lee


Archive | 2006

Dielectric structures having high dielectric constants, methods of forming the dielectric structures, non-volatile semiconductor memory devices having the dielectric structures and methods of manufacturing the non-volatile semiconductor memory devices

Jong-Cheol Lee; Sung-Tae Kim; Young-sun Kim; Cha-young Yoo; Gab-jin Nam; Young-Geun Park; Jae-Hyoung Choi; Jae-hyun Yeo; Ha-Jin Lim; Yun-Seok Kim


Archive | 2006

Dielectric structures having high dielectric constants, and non-volatile semiconductor memory devices having the dielectric structures

Jong-Cheol Lee; Sung-Tae Kim; Young-sun Kim; Cha-young Yoo; Gab-jin Nam; Young-Geun Park; Jae-Hyoung Choi; Jae-hyun Yeo; Ha-Jin Lim; Yun-Seok Kim


Archive | 2007

METHOD OF FABRICATING TRAP NONVOLATILE MEMORY DEVICE

Han-mei Choi; Chang-Hyun Lee; Seung-Hwan Lee; Young-Geun Park; Sung-Jung Kim; Young-sun Kim


Archive | 2007

METHOD OF FORMING A LAYER AND METHOD OF MANUFACTURING A CAPACITOR USING THE SAME

Eun-ae Chung; Kyoung-Ryul Yoon; Ki-Vin Im; Jae-hyun Yeo; Sung-Tae Kim; Young-sun Kim; Young-Geun Park


Archive | 2006

FLASH MEMORY DEVICES HAVING MULTILAYERED INTER-GATE DIELECTRIC LAYERS INCLUDING METAL OXIDE LAYERS AND METHODS OF MANUFACTURING THE SAME

Han-mei Choi; Young-Geun Park; Seung-Hwan Lee; Young-sun Kim


Archive | 2005

Methods of forming a layer utilizing a liquid-phase lanthanum precursor and methods of manufacturing a capacitor using the same

Gab-jin Nam; Young-Geun Park; Young-sun Kim; Han-mei Choi; Seung-Hwan Lee; Ki-yeon Park; Cha-Young You


Archive | 2011

Methods of forming conductive layer patterns using gas phase cleaning process and methods of manufacturing semiconductor devices

Jun-kyu Yang; Young-Geun Park; Ki-Hyun Hwang; Han-mei Choi; Dong-Chul Yoo

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