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Akira Tokui

Mitsubishi

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Publication

Featured researches published by Akira Tokui.

Archive | 1991

Method for forming a thin layer on a semiconductor substrate and apparatus therefor

Katsuhiro Tsukamoto; Akira Tokui

Archive | 1991

Apparatus for forming a thin film on surface of semiconductor substrate

Masanobu Iwasaki; Hiromi Itoh; Akira Tokui; Katsuyoshi Mitsui; Katsuhiro Tsukamoto

Archive | 1989

Method for forming a thin layer on a semiconductor substrate

Katsuhiro Tsukamoto; Akira Tokui

Archive | 1989

Method for pretreating semiconductor substrate by photochemically removing native oxide

Hiromi Itoh; Masanobu Iwasaki; Akira Tokui; Katsuhiro Tsukamoto

Archive | 1992

Method of forming minute patterns using positive chemically amplifying type resist

Akira Tokui; Masahiro Yoneda

Archive | 1991

Apparatus for inspecting a phase shift mask

Akira Tokui; Tetsuro Hanawa

Archive | 1990

Method of forming minute patterns using chemically amplifying type resist

Akira Tokui; Masahiro Yoneda

Archive | 1993

Photomask and pattern transfer method for transferring a pattern onto a substrate having different levels

Akira Tokui; Maria O. DeBeeck

Archive | 1986

Method for fabricting a semiconductor device

Masayuki Nakajima; Shinichi Sato; Akira Tokui; Akira Kawai; Masao Nagatomo; Hiroji Ozaki

Archive | 1990

Semiconductor memory device and fabricating method thereof

Akira Tokui; Shinichi Sato; Akira Kawai; Masayuki Nakajima; Hiroji Ozaki; Masao Nagatomo

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Akira Kawai

Mitsubishi

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Hiroji Ozaki

Mitsubishi

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Masao Nagatomo

Mitsubishi

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Masayuki Nakajima

Mitsubishi

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Shinichi Sato

Mitsubishi

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Katsuhiro Tsukamoto

Mitsubishi

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Hiromi Itoh

Mitsubishi

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Masahiro Yoneda

Mitsubishi

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Masanobu Iwasaki

Mitsubishi

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Katsuyoshi Mitsui

Mitsubishi

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