Hiromi Itoh

Electronic device using zirconate titanate and barium titanate ferroelectrics in insulating layer

Semiconductor device having a ferroelectric capacitor with a planarized lower electrode

Apparatus for forming a thin film on surface of semiconductor substrate

Method for pretreating semiconductor substrate by photochemically removing native oxide

Method of forming thin film for semiconductor device

Method of an apparatus for forming thin film for semiconductor device

Method of forming a thin film on surface of semiconductor substrate

Method of manufacturing a semiconductor memory device

Method and apparatus for laser-induced CVD

Photochemical film-forming method