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Dive into the research topics where Masao Nagatomo is active.

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Featured researches published by Masao Nagatomo.


IEEE Transactions on Electron Devices | 1991

Graded-junction gate/n/sup -/ overlapped LDD MOSFET structures for high hot-carrier reliability

Yoshinori Okumura; Tatsuya Kunikiyo; Ikuo Ogoh; Hideki Genjo; Masahide Inuishi; Masao Nagatomo; Takayuki Matsukawa

A newly developed gate/n/sup -/ overlapped LDD MOSFET was investigated. The MOSFET was fabricated by an oblique rotating ion implantation technique. A formula for the impurity ion profile was derived to analyze the lowering of substrate current and improvement of the degradation caused by the hot-carrier effect of the MOSFET. It was proved that the impurity ion profile near the drain edge is remarkably graded in the directions along channel and toward substrate even just after the implantation, so that the maximum lateral electric field is relaxed as compared with conventional LDD MOSFETs. Also, the maximum point of the lateral electric field at the drain edge is located apart from the main path of the channel current. >


Archive | 1989

Method of fibricating a semiconductor device having a trench

Tatsuya Ishii; Yoji Mashiko; Masao Nagatomo; Michihiro Yamada


Archive | 1991

Element isolating structure of semiconductor device suitable for high density integration

Masao Nagatomo; Hiroki Shimano; Tomonori Okudaira; Yoshinori Okumura


Archive | 1992

Semiconductor device having a redundant circuit portion and a manufacturing method of the same

Kaoru Motonami; Masao Nagatomo


Archive | 1989

Method of implanting into the sidewall of a trench by rotating the wafer

Masao Nagatomo


Archive | 1988

Semiconductor device having a plurality of conductive layers and manufacturing method therefor

Yoshinori Okumura; Atsuhiro Fujii; Masao Nagatomo; Hiroji Ozaki; Wataru Wakamiya; Takayuki Matsukawa


Archive | 1993

DRAM device comprising a stacked type capacitor and a method of manufacturing thereof

Ikuo Ogoh; Masao Nagatomo


Archive | 1988

Semiconductor device with no stress generated at the trench corner portion and the method for making the same

Tatsuya Ishii; Yoshinori Okumura; Masao Nagatomo


Archive | 1989

Method for making semiconductor device with no stress generated at the trench corner portion

Tatsuya Ishii; Yoshinori Okumura; Masao Nagatomo


Archive | 1988

Semiconductor device having interconnection layers of T-shape cross section

Shinichi Satoh; Makoto Hirayama; Masao Nagatomo; Ikuo Ogoh; Yoshikazu Ohno; Masato Fujinaga

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