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Alan Becknell

Axcelis Technologies

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Publication

Featured researches published by Alan Becknell.

Archive | 2004

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

Alan Becknell; Thomas Buckley; David Ferris; Richard E. Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

Archive | 2005

Apparatus and plasma ashing process for increasing photoresist removal rate

Alan Becknell; Philip Hammar; David Ferris

Archive | 2006

PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS

Palanikumaran Sakthivel; Thomas Buckley; Alan Becknell

Archive | 2012

PLASMA ASHING PROCESS FOR INCREASING PHOTORESIST REMOVAL RATE

David Ferris; Philip Hammar; Alan Becknell

Archive | 2007

Verfahren zur überwachung der konzentrationen von sauerstoff- und/oder stickstoffspezies in einem weitgehend sauerstoff- und stickstofffreien plasmaveraschungsverfahren Plasma ashing process method for monitoring the concentrations of oxygen and / or nitrogen species in a largely oxygen- and nitrogen-free

Palanikumaran Sakthivel; Thomas Buckley; Alan Becknell

Archive | 2005

Plasma ashing process for increasing photoresist removal rate and plasma apparatus wuth cooling means

David Ferris; Philip Hammar; Alan Becknell

Archive | 2005

Plasmaveraschungsverfahren zur erhöhung der photoresist-entfernungsrate und plasmavorrichtung mit kühleinrichtungen

David Ferris; Philip Hammar; Alan Becknell

Archive | 2004

Appareil au plasma, ensemble de distribution de gaz pour appareil au plasma et procédés correspondants

Alan Becknell; Thomas Buckley; David Ferris; Richard Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

Archive | 2004

Appareil a plasma, ensemble de distribution de gaz pour appareil a plasma et procedes associes

Alan Becknell; Thomas Buckley; David Ferris; Richard Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

Archive | 2004

Downstream plasma treatment device

Alan Becknell; Thomas Buckley; David Ferris; Richard E. Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

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David Ferris

Axcelis Technologies

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Palanikumaran Sakthivel

Axcelis Technologies

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Thomas Buckley

Axcelis Technologies

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Aseem Srivastava

Axcelis Technologies

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Carlo Waldfried

Axcelis Technologies

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Richard Pingree

Eaton Corporation

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Philip Hammar

Axcelis Technologies

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Richard E. Pingree

Axcelis Technologies

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