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Palanikumaran Sakthivel

Axcelis Technologies

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Publication

Featured researches published by Palanikumaran Sakthivel.

Archive | 2001

Plasma ashing process

Carlo Waldfried; Orlando Escorcia; Qingyuan Han; Thomas Buckley; Palanikumaran Sakthivel

Archive | 2004

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

Alan Becknell; Thomas Buckley; David Ferris; Richard E. Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

Archive | 2009

Plasma ashing apparatus and endpoint detection process

Aseem Srivastava; Palanikumaran Sakthivel; Thomas Buckley

Archive | 2006

PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS

Palanikumaran Sakthivel; Thomas Buckley; Alan Becknell

Archive | 2005

Medium pressure plasma system for removal of surface layers without substrate loss

John C. Wolfe; Aseem Srivastava; Ivan I. Berry; Palanikumaran Sakthivel

international conference on solid state and integrated circuits technology | 2006

UV curing technology for advanced device fabrication: challenges and solutions

Carlo Waldfried; Palanikumaran Sakthivel; Peter Frisella; Darren Moore; Ivan Berry; Kevin Durr; Qingyuan Han

Archive | 2004

Plasma ashing apparatus comprising an endpoint detection system

Aseem Srivastava; Palanikumaran Sakthivel; Thomas Buckley

Archive | 2007

Verfahren zur überwachung der konzentrationen von sauerstoff- und/oder stickstoffspezies in einem weitgehend sauerstoff- und stickstofffreien plasmaveraschungsverfahren Plasma ashing process method for monitoring the concentrations of oxygen and / or nitrogen species in a largely oxygen- and nitrogen-free

Palanikumaran Sakthivel; Thomas Buckley; Alan Becknell

Archive | 2004

Appareil de polissage humide au plasma et procede de detection de point d'extremite

Aseem Srivastava; Palanikumaran Sakthivel; Thomas Buckley

Archive | 2004

Appareil au plasma, ensemble de distribution de gaz pour appareil au plasma et procédés correspondants

Alan Becknell; Thomas Buckley; David Ferris; Richard Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

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Thomas Buckley

Axcelis Technologies

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Aseem Srivastava

Axcelis Technologies

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Alan Becknell

Axcelis Technologies

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Carlo Waldfried

Axcelis Technologies

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David Ferris

Axcelis Technologies

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Richard Pingree

Eaton Corporation

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Qingyuan Han

Eaton Corporation

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Richard E. Pingree

Axcelis Technologies

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Darren Moore

LSI Corporation

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Ivan Berry

Axcelis Technologies

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