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David Ferris

Axcelis Technologies

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Publication

Featured researches published by David Ferris.

Archive | 2004

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

Alan Becknell; Thomas Buckley; David Ferris; Richard E. Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

Archive | 2005

Apparatus and plasma ashing process for increasing photoresist removal rate

Alan Becknell; Philip Hammar; David Ferris

Archive | 2003

Reactor assembly and processing method

David William Kinnard; David Ferris

Archive | 2005

Multi-piece baffle plate assembly for a plasma processing system

David Ferris; Aseem K. Srivastava; Maw S. Tun

Archive | 2012

PLASMA ASHING PROCESS FOR INCREASING PHOTORESIST REMOVAL RATE

David Ferris; Philip Hammar; Alan Becknell

Archive | 2005

Segmented baffle plate assembly for a plasma processing system

David Ferris; Aseem Srivastava; Maw Tun

Archive | 2005

Plasma ashing process for increasing photoresist removal rate and plasma apparatus wuth cooling means

David Ferris; Philip Hammar; Alan Becknell

Archive | 2005

Plasmaveraschungsverfahren zur erhöhung der photoresist-entfernungsrate und plasmavorrichtung mit kühleinrichtungen

David Ferris; Philip Hammar; Alan Becknell

Archive | 2005

Segmentierte prallplatte für ein plasmaverarbeitungssystem

David Ferris; Aseem Srivastava; Maw Tun

Archive | 2004

Appareil au plasma, ensemble de distribution de gaz pour appareil au plasma et procédés correspondants

Alan Becknell; Thomas Buckley; David Ferris; Richard Pingree; Palanikumaran Sakthivel; Aseem Srivastava; Carlo Waldfried

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Collaboration

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Alan Becknell

Axcelis Technologies

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Aseem Srivastava

Axcelis Technologies

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Carlo Waldfried

Axcelis Technologies

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Palanikumaran Sakthivel

Axcelis Technologies

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Thomas Buckley

Axcelis Technologies

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Richard Pingree

Eaton Corporation

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Philip Hammar

Axcelis Technologies

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Maw Tun

Axcelis Technologies

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Richard E. Pingree

Axcelis Technologies

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Aseem K. Srivastava

Lam Research

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