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Alexander Dr. Büttner

KLA-Tencor

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Publication

Featured researches published by Alexander Dr. Büttner.

Archive | 2010

Apparatus for the optical inspection of wafers

Kurt Hahn; Roland Hedrich; Gerhard Hoppen; Lambert Danner; Albert Kreh; Wolfgang Vollrath; Alexander Dr. Büttner; Christof Krampe-Zadler; Henning Backhauss; Hermann Dr. Bittner

Archive | 2009

Device and method for the inspection of defects on the edge region of a wafer

Lambert Danner; Michael Heiden; Wolfgang Vollrath; Alexander Dr. Büttner; Christof Krampe-Zadler

Archive | 2009

Vorrichtung zur Wafer-Inspektion

Wolfgang Vollrath; Christof Krampe-Zadler; Alexander Dr. Büttner

Archive | 2010

Verfahren zum Fokussieren einer Objektebene und optische Anordnung A method of focusing an object plane and the optical arrangement

Alexander Dr. Büttner; Lambert Danner; Wolfgang Sulik

Archive | 2009

Vorrichtung zur optischen Waferinspektion

Henning Backhauss; Hermann Dr. Bittner; Alexander Dr. Büttner; Lambert Danner; Kurt Hahn; Roland Hedrich; Gerhard Hoppen; Christof Krampe-Zadler; Albert Kreh; Wolfgang Vollrath

Archive | 2007

Wafer surface area detecting device, has line scan camera with detector row whose length is smaller than diameter of wafer, and color scan camera with two-dimensional detector chip upstream to dispersive element

Alexander Dr. Büttner; Christof Krampe-Zadler; Wolfgang Vollrath

Archive | 2007

Vorrichtung zur Beleuchtung und Inspektion einer Oberfläche

Alexander Dr. Büttner; Lambert Danner; Michael Heiden

Archive | 2006

Vorrichtung zur Beleuchtung und Inspektion einer Oberfläche Apparatus for lighting and inspection of a surface

Alexander Dr. Büttner; Lambert Danner; Michael Heiden

Archive | 2006

Vorrichtung zur Beleuchtung und zur Inspektion einer Oberfläche Apparatus for lighting and for inspecting a surface

Alexander Dr. Büttner; Lambert Danner; Michael Heiden

Archive | 2006

Vorrichtung zur Wafer-Inspektion Apparatus for wafer inspection

Alexander Dr. Büttner; Christof Krampe-Zadler; Wolfgang Vollrath

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Collaboration

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Lambert Danner

Leica Microsystems

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Michael Heiden

Leica Microsystems

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Christof Krampe-Zadler

KLA-Tencor

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Wolfgang Vollrath

KLA-Tencor

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Christof Krampe-Zadler

KLA-Tencor

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Wolfgang Vollrath

KLA-Tencor

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Albert Kreh

KLA-Tencor

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Gerhard Hoppen

KLA-Tencor

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Henning Backhauss

KLA-Tencor

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Hermann Dr. Bittner

KLA-Tencor

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