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Christof Krampe-Zadler

KLA-Tencor

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Publication

Featured researches published by Christof Krampe-Zadler.

Archive | 2007

Apparatus for wafer inspection

Wolfgang Vollrath; Alexander Buettner; Christof Krampe-Zadler

Archive | 2008

Illumination means and inspection means having an illumination means

Kurt Hahn; Michael Hofmann; Christof Krampe-Zadler

Archive | 2010

Apparatus for the optical inspection of wafers

Kurt Hahn; Roland Hedrich; Gerhard Hoppen; Lambert Danner; Albert Kreh; Wolfgang Vollrath; Alexander Dr. Büttner; Christof Krampe-Zadler; Henning Backhauss; Hermann Dr. Bittner

Archive | 2006

Apparatus for Inspecting a Wafer

Henning Backhauss; Albert Kreh; Christof Krampe-Zadler

Archive | 2009

Vorrichtung zur optischen Waferinspektion

Henning Backhauss; Hermann Dr. Bittner; Alexander Dr. Büttner; Lambert Danner; Kurt Hahn; Roland Hedrich; Gerhard Hoppen; Christof Krampe-Zadler; Albert Kreh; Wolfgang Vollrath

Archive | 2009

Beleuchtungseinrichtung, Verwendung der Beleuchtungseinrichtung bei flächigen Substraten und Inspektionseinrichtung mit Beleuchtungseinrichtung

Michael Hofmann; Christof Krampe-Zadler; Kurt Hahn

Archive | 2008

Device and method for scanning the whole surface of a wafer

Wolfgang Vollrath; Alexander Buettner; Christof Krampe-Zadler

Archive | 2007

Wafer surface area detecting device, has line scan camera with detector row whose length is smaller than diameter of wafer, and color scan camera with two-dimensional detector chip upstream to dispersive element

Alexander Dr. Büttner; Christof Krampe-Zadler; Wolfgang Vollrath

Archive | 2007

Beleuchtungseinrichtung und Inspektionseinrichtung mit Beleuchtungseinrichtung Illumination device and inspection device with illumination

Kurt Hahn; Michael Hofmann; Christof Krampe-Zadler

Archive | 2007

Lighting device using the illumination device for flat substrates and inspection device with a lighting unit

Kurt Hahn; Michael Hofmann; Christof Krampe-Zadler

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Collaboration

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Kurt Hahn

KLA-Tencor

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Wolfgang Vollrath

KLA-Tencor

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Alexander Dr. Büttner

KLA-Tencor

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Albert Kreh

KLA-Tencor

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Gerhard Hoppen

KLA-Tencor

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Henning Backhauss

KLA-Tencor

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Hermann Dr. Bittner

KLA-Tencor

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Lambert Danner

KLA-Tencor

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Roland Hedrich

KLA-Tencor

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Albert Kreh

KLA-Tencor

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