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Dive into the research topics where Bernhard Gellrich is active.

Publication


Featured researches published by Bernhard Gellrich.


Archive | 2004

Holding Device for an Optical Element in an Objective

Bernhard Gellrich; Andreas Wurmbrand; Jens Kugler; Armin Schoeppach; Christian Zengerling; Stephane Bruynooghe


Archive | 2001

Optical element deformation system

Frank Melzer; Michael Mühlbeyer; Bernhard Gellrich; Franz Sorg; Stefan Xalter; Thomas Ittner


Archive | 2000

Assembly comprising an optical element and a mount

Michael Trunz; Ralf Hilgers; Bernhard Gellrich


Archive | 2004

Collector with fastening devices for fastening mirror shells

Wolfgang Singer; Wilhelm Egle; Markus Weiss; Joachim Hainz; Joachim Wietzorrek; Johannes Wangler; Frank Melzer; Bernhard Gellrich; Bernhard Geuppert; Erich Schubert; Martin Antoni


Archive | 2001

Mounting apparatus for an optical element

Jochen Becker; Bernhard Gellrich; Werner Lang; Alexander Kohl; Sascha Kraus


Archive | 2004

Adjustment Arrangement of an Optical Element

Klaus Beck; Bernhard Gellrich; Hubert Holderer; Thomas Petasch; Cornelia Roesch; Alexander Kohl


Archive | 2009

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same

Stephan Six; Michael Lill; Ruediger Duesing; Bernhard Gellrich; Michael Widmann; Andreas Schubert; Tilmann Von Papen; Thomas Ihl


Archive | 2009

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

Guido Limbach; Franz Sorg; Armin Schoeppach; Ulrich Weber; Ulrich Loering; Dirk Hellweg; Peter Meyer; Stefan Xalter; Jens Kugler; Bernhard Gellrich; Stefan Hembacher; Bernhard Geuppert; Aksel Goehnermeier


Archive | 2004

Microlithographic projection exposure system, and method for introducing an immersion liquid into an immersion chamber

Bernhard Gellrich; Gerd Reisinger; Dieter Schmerek; Jens Kugler


Archive | 2002

System for damping oscillations

Franz Sorg; Stefan Xalter; Frank Melzer; Bernhard Gellrich; Michael Muehlbeyer

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