Erich Merz | Researchain

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Featured researches published by Erich Merz.

Archive | 1999

Optical system, especially a projection light facility for microlithography

Erwin Gaber; Christian Wagner; Hubert Holderer; Michael Gerhard; Erich Merz; Jochen Becker; Arie Cornelis Scheiberlich

Archive | 1999

Optical system, in particular projection-illumination unit used in microlithography

Erich Merz; Jochen Becker

Archive | 2000

Optical imaging device, particularly an objective, with at least one optical element

Michael Trunz; Ralf Hilgers; Erich Merz; Michael Mühlbeyer

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 1998

Projection light exposure system for microlithography

Hubert Holderer; Erich Merz; Christian Wagner; Erwin Gaber; Michael Gerhard

Archive | 2007

Imaging device in a projection exposure machine

Wolfgang Hummel; Jürgen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schöngart; Markus Neumaier; Bärbel Trossbach; Ulrich Weber; Michael Mühlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2006