Ramprakash Sankarakrishnan

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Archive | 2009

Method and System for Supplying a Cleaning Gas Into a Process Chamber

Ramprakash Sankarakrishnan; Dale R. Du Bois; Ganesh Balasubramanian; Karthik Janakiraman; Juan Carlos Rocha-Alvarez; Thomas Nowak; Visweswaren Sivaramakrishnan; Hichem M'Saad

Archive | 2011

Confined process volume pecvd chamber

Ramprakash Sankarakrishnan; Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Dale R. Du Bois; Mark Fodor; Jianhua Zhou; Amit Kumar Bansal; Mohamad A. Ayoub; Shahid Shaikh; Patrick Reilly; Deenesh Padhi; Thomas Nowak

Archive | 2015

WAFER ROTATION IN A SEMICONDUCTOR CHAMBER

Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Ramprakash Sankarakrishnan; Robert Kim; Dale R. Du Bois; Kirby H. Floyd; Amit Kumar Bansal; Tuan Anh Nguyen

Archive | 2012

Methods of dry stripping boron-carbon films

Kwangduk Douglas Lee; Sudha Rathi; Ramprakash Sankarakrishnan; Martin Jay Seamons; Irfan Jamil; Bok Hoen Kim

Archive | 2014

HIGH IMPEDANCE RF FILTER FOR HEATER WITH IMPEDANCE TUNING DEVICE

Jian J. Chen; Mohamad A. Ayoub; Juan Carlos Rocha-Alvarez; Zheng John Ye; Ramprakash Sankarakrishnan; Jianhua Zhou

Archive | 2014

CONTROLLING TEMPERATURE IN SUBSTRATE PROCESSING SYSTEMS

Juan Carlos Rocha-Alvarez; Amit Kumar Bansal; Ganesh Balasubramanian; Jianhua Zhou; Ramprakash Sankarakrishnan

Archive | 2013

BOTTOM AND SIDE PLASMA TUNING HAVING CLOSED LOOP CONTROL

Juan Carlos Rocha-Alvarez; Amit Kumar Bansal; Ganesh Balasubramanian; Jianhua Zhou; Ramprakash Sankarakrishnan; Mohamad A. Ayoub; Jian J. Chen

Archive | 2016

MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING

Xing Lin; Bozhi Yang; Jianhua Zhou; Dale R. DuBois; Juan Carlos Rocha-Alvarez; Ramprakash Sankarakrishnan

Archive | 2013

PECVD APPARATUS AND PROCESS

Nagarajan Rajagopalan; Xinhai Han; Michael Wenyoung Tsiang; Masaki Ogata; Zhijun Jiang; Juan Carlos Rocha-Alvarez; Thomas Nowak; Jianhua Zhou; Ramprakash Sankarakrishnan; Ganesh Balasubramanian; Amit Kumar Bansal; Jeongmin Lee; Todd Egan; Edward W. Budiarto; Dmitriy Panasyuk; Terrance Y. Lee; Jian J. Chen; Mohamad A. Ayoub; Heung Lak Park; Patrick Reilly; Shahid Shaikh; Bok Hoen Kim; Sergey Starik

Archive | 2017