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Anatoly Romanovsky

KLA-Tencor

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Publication

Featured researches published by Anatoly Romanovsky.

Archive | 2008

SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTENDING THE DETECTION RANGE OF AN INSPECTION SYSTEM

Christian Wolters; Anatoly Romanovsky

Archive | 2005

Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation

Christian Wolters; Anatoly Romanovsky; Alexander Slobodov

Archive | 2008

Contemporaneous surface and edge inspection

Christian Wolters; Anatoly Romanovsky

Archive | 2011

Extending the lifetime of a deep uv laser in a wafer inspection tool

Anatoly Romanovsky; George Kren; Bret Whiteside

Archive | 2006

Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system by avoiding detector and circuit saturation

Christian Wolters; Anatoly Romanovsky; Alexander Slobodov

Archive | 2010

Fast laser power control with improved reliability for surface inspection

Stephen Biellak; Daniel Kavaldjiev; George Kren; Anatoly Romanovsky; Christian Wolters

Archive | 2009

Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system

Aleksey Petrenko; Christian Wolters; Zhongping Cai; Anatoly Romanovsky; Bret Whiteside

Archive | 2008

Dynamic range extension in surface inspection systems

Christian Wolters; Anatoly Romanovsky; Daniel Kavaldjiev; Bret Whiteside

Archive | 2007

Inspection Systems and Methods for Extending the Detection Range of an Inspection System by Forcing the Photodetector into the Non-Linear Range

Zhongping Cai; Alexander Slobodov; Anatoly Romanovsky; Christian Wolters

Archive | 2016

TDI Sensor in a Darkfield System

Jijen Vazhaeparambil; Guoheng Zhao; Daniel Kavaldjiev; Anatoly Romanovsky; Ivan Maleev; Christian Wolters; Stephen Biellak; Bret Whiteside; Donald W. Pettibone; Yung-Ho Alex Chuang; David W. Shortt

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Christian Wolters

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Bret Whiteside

KLA-Tencor

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Alexander Slobodov

KLA-Tencor

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Daniel Kavaldjiev

KLA-Tencor

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Stephen Biellak

KLA-Tencor

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George Kren

KLA-Tencor

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Guoheng Zhao

KLA-Tencor

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Jijen Vazhaeparambil

KLA-Tencor

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Zhongping Cai

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Donald W. Pettibone

KLA-Tencor

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