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Stephen Biellak

KLA-Tencor

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Publication

Featured researches published by Stephen Biellak.

Archive | 2002

Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection

Mehdi Vaez-Iravani; Stan Stokowski; Stephen Biellak; Jamie Sullivan; Keith B. Wells; Mehrdad Nikoonahad

Archive | 2005

Methods and systems for inspection of a wafer

David W. Shortt; Stephen Biellak; Alexander Belyaev

Archive | 2008

SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF A WAFER

Stephen Biellak; Daniel Kavaldjiev

Archive | 2006

Enhanced simultaneous multi-spot inspection and imaging

Stephen Biellak; David W. Shortt

Archive | 2010

Photomultiplier tube optimized for surface inspection in the ultraviolet

Stephen Biellak; Daniel Kavaldjiev; Stuart Friedman

Archive | 2008

Computer-implemented methods for inspecting and/or classifying a wafer

Juergen Reich; Louis Vintro; Prasanna Dighe; Andrew Steinbach; Daniel Kavaldjiev; Stephen Biellak

Archive | 2006

Systems and methods for determining a characteristic of a specimen

Stephen Biellak; David W. Shortt

Archive | 2008

Systems and methods for inspecting wafers

Mehdi Vaez-Iravani; Stephen Biellak

Archive | 2013

Sample Inspection System Detector

Daniel Kavaldjiev; Stephen Biellak; Guoheng Zhao; Mehdi Vaez-Iravani

Archive | 2012

Segmented polarizer for optimizing performance of a surface inspection system

Stephen Biellak; Daniel Kavaldjiev

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Daniel Kavaldjiev

KLA-Tencor

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Christian Wolters

KLA-Tencor

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Guoheng Zhao

KLA-Tencor

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Mehdi Vaez-Iravani

KLA-Tencor

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Anatoly Romanovsky

KLA-Tencor

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David W. Shortt

KLA-Tencor

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Bret Whiteside

KLA-Tencor

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Jijen Vazhaeparambil

KLA-Tencor

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Donald W. Pettibone

KLA-Tencor

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George Kren

KLA-Tencor

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