Andreas D. Stricker

Self-aligned SiGe NPN transistors with 285 GHz f/sub MAX/ and 207 GHz f/sub T/ in a manufacturable technology

This paper reports on SiGe NPN HBTs with unity gain cutoff frequency (f/sub T/) of 207 GHz and an f/sub MAX/ extrapolated from Masons unilateral gain of 285 GHz. f/sub MAX/ extrapolated from maximum available gain is 194 GHz. Transistors sized 0.12/spl times/2.5 /spl mu/m/sup 2/ have these characteristics at a linear current of 1.0 mA//spl mu/m (8.3 mA//spl mu/m/sup 2/). Smaller transistors (0.12/spl times/0.5 /spl mu/m/sup 2/) have an f/sub T/ of 180 GHz at 800 /spl mu/A current. The devices have a pinched base sheet resistance of 2.5 k/spl Omega//sq. and an open-base breakdown voltage BV/sub CEO/ of 1.7 V. The improved performance is a result of a new self-aligned device structure that minimizes parasitic resistance and capacitance without affecting f/sub T/ at small lateral dimensions.

SiGe HBTs with cut-off frequency of 350 GHz

This work reports on SiGe HBTs with f/sub T/ of 350 GHz. This is the highest reported f/sub T/ for any Si-based transistor as well as any bipolar transistor. Associated f/sub max/ is 170 GHz, and BV/sub CEO/ and BV/sub CBO/ are measured to be 1.4 V and 5.0 V, respectively. Also achieved was the simultaneous optimization of f/sub T/ and f/sub max/ resulting in 270 GHz and 260 GHz, with BV/sub CEO/ and BV/sub CBO/ of 1.6 V and 5.5 V, respectively. The dependence of device performance on bias condition and device dimension has been investigated. Considerations regarding the extraction of such high f/sub T/ and f/sub max/ values are also discussed.

Electron and hole mobility in silicon at large operating temperatures. I. Bulk mobility

In this paper, an experimental investigation on high-temperature carrier mobility in bulk silicon is carried out with the aim of improving our qualitative and quantitative understanding of carrier transport under ESD events. Circular van der Pauw patterns, suitable for resistivity and Hall measurements, were designed and manufactured using both the n and p layers made available by the BCD-3 smart-power technology. The previous measurements were carried out using a special measurement setup that allows operating temperatures in excess of 400/spl deg/C to be reached within the polar expansions of a commercial magnet. A novel extraction methodology that allows for the determination of the Hall factor and drift mobility against impurity concentration and lattice temperature has been developed. Also, a compact mobility model suitable for implementation in device simulators is worked out and implemented in the DESSIS/spl copy/ code. Comparisons with the mobility models by G. Masetti et al. (1983) and D.B.M. Klaassen (1992) are shown in the temperature range between 25 and 400/spl deg/C.

A 210-GHz f/sub T/ SiGe HBT with a non-self-aligned structure

A record 210-GHz f/sub T/ SiGe heterojunction bipolar transistor at a collector current density of 6-9 mA//spl mu/m/sup 2/ is fabricated with a new nonself-aligned (NSA) structure based on 0.18 /spl mu/m technology. This NSA structure has a low-complexity emitter and extrinsic base process which reduces overall thermal cycle and minimizes transient enhanced diffusion. A low-power performance has been achieved which requires only 1 mA collector current to reach 200-GHz f/sub T/. The performance is a result of narrow base width and reduced parasitics in the device. Detailed comparison is made to a 120-GHz self-aligned production device.

Scaling of SiGe Heterojunction Bipolar Transistors

Scaling has been the principal driving force behind the successful technology innovations of the past half-century. This paper investigates the impacts of scaling on SiGe heterojunction bipolar transistors (HBTs), which have recently emerged as a strong contender for RF and mixed-signal applications. The impacts of scaling on key performance metrics such as speed and noise are explored, and both theory and data show that scaling, both vertical and lateral, has mostly beneficial effects on these metrics. However, it is shown that the scaled devices are increasingly vulnerable to device reliability issues due to increased electric field and operation current density. Bipolar transistor scaling rules are reviewed and compared with accumulated reported data for verification. A review of scaling limits suggests that bipolar scaling has not reached the physical fundamental limit yet, promising a continued improvement of bipolar performance in the foreseeable future.

Transistor design and application considerations for >200-GHz SiGe HBTs

SiGe HBT transistors achieving over 200 GHz f/sub T/ and f/sub MAX/ are demonstrated in this paper. Techniques and trends in SiGe HBT design are discussed. Processing techniques available to silicon technologies are utilized to minimize parasitic resistances and capacitances and thereby establish raw speeds exceeding III-V devices despite the higher mobility in those materials. Higher current densities and greater avalanche currents, which are required for establishing such high performance, are discussed as they relate to device self-heating and reliability and the degradation of the devices. Simple circuit results are shown, demonstrating 4.2-ps ring-oscillator delays.

SiGe HBTs for millimeter-wave applications with simultaneously optimized f/sub T/ and f/sub max/ of 300 GHz

Millimeter-wave applications are gaining growing interest in recent times. To meet the challenges for such applications, SiGe HBTs, with simultaneously optimized f/sub T/ and f/sub max/ of >300 GHz, are developed. To the authors knowledge, this is the first report of f/sub T/ and f/sub max/ both exceeding 300 GHz for any Si-based transistor. BV/sub CEO/ and BV/sub CBO/ are 1.6 V and 5.5 V, respectively, with peak current gain of 660. Noise measurement shows F/sub min/ of 0.45 dB and 1.4 dB at 10 GHz and 25 GHz with associate gain of 14 dB and 8 dB, respectively. The results indicate SiGe HBTs are highly suitable for the rapidly expanding millimeter-wave applications.

Reverse active mode current characteristics of SiGe HBTs

The current characteristics of SiGe heterojunction bipolar transistors (HBTs) operating in the reverse active mode are investigated. It is experimentally shown that the I/sub C/ is identical for the reverse and the forward modes for arbitrary doping and Ge profiles across the base to first order. In contrast, the impact of V/sub BE/ and V/sub CB/ modulation on I/sub C/ is opposite for the two modes, leading to a smaller Early voltage but more ideal collector current for the reverse mode.

A technology simulation methodology for AC-performance optimization of SiGe HBTs

A methodology for simultaneous calibration of SiGe HBT process and device simulation is presented and applied to SiGe BiCMOS HBTs with peak cut-off frequencies ranging from 100 GHz to 200 GHz. Predictive simulation capability is demonstrated for critical HBT AC device characteristics through comparison with experimental devices.

Demonstration of Error-Free 32-Gb/s Operation From Monolithic CMOS Nanophotonic Transmitters

We present a monolithic CMOS-integrated nanophotonic transmitter with a link sensitivity comparable with a 25-Gb/s commercial reference transmitter. Our CMOS transmitter shows error-free operation up to 32 Gb/s, and exhibits a 4.8-dB extinction ratio and 4.9-dB insertion loss at 25 Gb/s.