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Andreas Heisler

Carl Zeiss AG

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Publication

Featured researches published by Andreas Heisler.

Archive | 2004

Facet mirror having a number of mirror facets

Hubert Holderer; Andreas Heisler; Wolfgang Singer; Markus Weiss; Andreas Seifert; Frank Melzer; Heinz Mann; Jürgen Faltus; Berndt Warm; Stefan Dornheim

Archive | 2002

Illumination system with a plurality of individual gratings

Wolfgang Singer; Markus Weiss; Bernd Kleemann; Karlfried Osterried; Johannes Wangler; Frank Melzer; Andreas Heisler; Vadim Yevgenyevich Banine

Archive | 2002

Mirror facet and facetted mirror

Wolfgang Singer; Markus Weiss; Andreas Seifert; Frank Melzer; Heinz Mann; Andreas Heisler; Hubert Holderer

Archive | 2004

Method for the production of a facetted mirror

Andreas Seifert; Markus Weiss; Andreas Heisler; Stefan Dornheim

Archive | 2004

Facet mirrors and a method for producing mirror facets

Andreas Seifert; Frank Melzer; Andreas Heisler; Heinz Mann; Gerhard Romeyn

Archive | 2003

Facetted mirror and holder and production process for a microlithographic projection unit in extreme ultraviolet determines and corrects deviations in mounting

Stefan Dornheim; Andreas Heisler; Andreas Seifert; Markus Dr. Weiss

Archive | 2002

Multi-faceted mirror

Hubert Holderer; Markus Weiss; Wolfgang Singer; Andreas Seifert; Andreas Heisler; Frank Melzer; Heinz Mann; Jürgen Faltus

Archive | 2008

Optical device e.g. illumination system, operating method for use in projection exposure system, involves storing element such that no parasitic adjustments or changes of element develop during or after rotation in imaging characteristics

Jürgen Fischer; Bernhard Gellrich; Andreas Heisler; Erich Merz; Thorsten Rassel; Andreas Schubert; Erich Schubert; Franz Sorg; Jochen Weber

Archive | 2010

Optical unit having adjustable force action on an optical module

Erich Schubert; Andreas Heisler; Joachim Hartjes

Archive | 2009

Optische einrichtung mit einstellbarer kraftwirkung auf ein optisches modul

Erich Schubert; Andreas Heisler; Joachim Hartjes

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Collaboration

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Andreas Seifert

Carl Zeiss AG

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Frank Melzer

Carl Zeiss AG

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Markus Weiss

Carl Zeiss AG

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Heinz Mann

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Hubert Holderer

Carl Zeiss AG

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Erich Schubert

Carl Zeiss AG

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Stefan Dornheim

Carl Zeiss AG

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Bernd Kleemann

Carl Zeiss AG

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Gerhard Romeyn

Carl Zeiss AG

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