Andrew P. Cowley | Researchain

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Featured researches published by Andrew P. Cowley.

international electron devices meeting | 2004

High performance and low power transistors integrated in 65nm bulk CMOS technology

Zhijiong Luo; A. Steegen; M. Eller; Randy W. Mann; C. Baiocco; Phung T. Nguyen; L. Kim; Mark Hoinkis; V. Ku; V. Klee; F. Jamin; P. Wrschka; P. Shafer; W. J. Lin; Sunfei Fang; A. Ajmera; W. Tan; D. Park; R. Mo; J. Lian; D. Vietzke; C. Coppock; A. Vayshenker; Terence B. Hook; V. Chan; K. Kim; Andrew P. Cowley; S. Kim; Erdem Kaltalioglu; B. Zhang

This paper reports a cutting-edge 65nm CMOS technology featuring high performance and low power CMOS devices for both general and low power applications. Utilizing plasma nitrided gate oxide, off-set and slim spacers, advanced co-implants, NiSi and low temperature MOL process, well designed NMOSFET and PMOSFET achieved significant improvement from the previous generation, especially PMOSFET has demonstrated an astonishing 35 % performance enhancement from the previous technology node

Archive | 2005

Structure and method for monitoring stress-induced degradation of conductive interconnects

Kaushik Chanda; Birendra N. Agarwala; Lawrence A. Clevenger; Andrew P. Cowley; Ronald G. Filippi; J. Gill; Tom C. Lee; Baozhen Li; Paul S. McLaughlin; Du B. Nguyen; Hazara S. Rathore; Timothy D. Sullivan; Chih-Chao Yang

Archive | 2006

Interconnect structure and method of fabrication of same

Chih-Chao Yang; Lawrence A. Clevenger; Andrew P. Cowley; Timothy J. Dalton; Meeyoung Yoon

Archive | 2003

BACK END INTERCONNECT WITH A SHAPED INTERFACE

Lawrence A. Clevenger; Andrew P. Cowley; Timothy J. Dalton; Mark Hoinkis; Steffen Kaldor; Erdem Kaltalioglu; Kaushik A. Kumar; Douglas C. La Tulipe; Jochen Schacht; Andrew H. Simon; Terry A. Spooner; Yun-Yu Wang; Clement Wann; Chih-Chao Yang

Archive | 2000

On-chip decoupling capacitor with bottom hardmask

Timothy J. Dalton; Andrew P. Cowley; Peter A. Emmi; Erdem Kaltalioglu; Vincent J. McGahay

Archive | 2005

Post-etch removal of fluorocarbon-based residues from a hybrid dielectric structure

Lawrence A. Clevenger; Andrew P. Cowley; Timothy J. Dalton; Mark Hoinkis; Kaushik A. Kumar; Douglas C. La Tulipe; David L. Rath; Chih-Chao Yang

Archive | 2001

Method of forming an on-chip decoupling capacitor with bottom hardmask

Timothy J. Dalton; Andrew P. Cowley; Peter A. Emmi; Erdem Kaltalioglu; Vincent J. McGahay

Archive | 2008

Method for prediction of premature dielectric breakdown in a semiconductor

Kaushik Chanda; Hazara S. Rathore; Paul S. McLaughlin; Robert D. Edwards; Lawrence A. Clevenger; Andrew P. Cowley; Chih-Chao Yang; Conrad Albert Barile

Archive | 2003