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Anton J. Devilliers

Tokyo Electron

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Publication

Featured researches published by Anton J. Devilliers.

Archive | 2015

Method for multiplying pattern density by crossing multiple patterned layers

Anton J. Devilliers

Archive | 2015

Self-Aligned Patterning using Directed Self-Assembly of Block Copolymers

Andrew Metz; Anton J. Devilliers

Archive | 2017

Methods of Forming Etch Masks for Sub-Resolution Substrate Patterning

Anton J. Devilliers

Archive | 2016

Negative Tone Developer Compatible Photoresist Composition and Methods of Use

Anton J. Devilliers

Archive | 2015

Method for Patterning a Substrate for Planarization

Anton J. Devilliers

Archive | 2015

Patterning a substrate using grafting polymer material

Anton J. Devilliers; Jeffrey S. Smith

Archive | 2018

EXTENSION REGION FOR A SEMICONDUCTOR DEVICE

Kandabara Tapily; Jeffrey Smith; Nihar Mohanty; Anton J. Devilliers

Archive | 2016

Method for Patterning Incorporating Misalignment Error Protection

Anton J. Devilliers; Jeffrey Smith

Archive | 2016

SUBSTRATE BACKSIDE TEXTURING

Carlos A. Fonseca; Benjamen M. Rathsack; Jeffrey Smith; Anton J. Devilliers; Lior Huli; Teruhiko Kodama; Joshua S. Hooge

Archive | 2016

Critical Dimension Control in Photo-Sensitized Chemically-Amplified Resist

Anton J. Devilliers

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Jeffrey Smith

Tokyo Electron

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James Grootegoed

Tokyo Electron

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Ronald Nasman

Tokyo Electron

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Norman A. Jacobson Jr.

Tokyo Electron

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Daniel Fulford

Tokyo Electron

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Joshua S. Hooge

Tokyo Electron

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Lior Huli

Tokyo Electron

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Rodney L. Robison

Tokyo Electron

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Andrew Metz

Tokyo Electron

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David Travis

Tokyo Electron

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