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Rodney L. Robison

Tokyo Electron

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Publication

Featured researches published by Rodney L. Robison.

Archive | 2004

Ionized physical vapor deposition (iPVD) process

Frank M. Cerio; Jacques Faguet; Bruce Gittleman; Rodney L. Robison

Archive | 2007

Plasma processing system with locally-efficient inductive plasma coupling

Jozef Brcka; Rodney L. Robison

Archive | 2007

Electrical contacts for integrated circuits and methods of forming using gas cluster ion beam processing

Rodney L. Robison; Douglas M. Trickett

Archive | 2008

High temperature electrostatic chuck and method of using

Ronald Nasman; Rodney L. Robison

IEEE Transactions on Plasma Science | 2007

Wafer Redeposition Impact on Etch Rate Uniformity in IPVD System

Jozef Brcka; Rodney L. Robison

Archive | 2008

METHOD OF DEPOSITING METAL-CONTAINING FILMS BY INDUCTIVELY COUPLED PHYSICAL VAPOR DEPOSITION

Rodney L. Robison; Frank M. Cerio

Archive | 2006

Selective-redeposition sources for calibrating a plasma process

Jozef Brcka; Rodney L. Robison; Takashi Horiuchi

Archive | 2008

APPARATUS AND METHOD FOR RF GROUNDING OF IPVD TABLE

Mirko Vukovic; James Grootegoed; Rodney L. Robison; Toshiaki Fujisato

Archive | 2005

Enhanced reliability deposition baffle for iPVD

Jozef Brcka; Rodney L. Robison

Archive | 2018

High-Precision Dispense System With Meniscus Control

Anton J. Devilliers; Rodney L. Robison; Ronald Nasman; David Travis; James Grootegoed; Norman A. Jacobson Jr.; David Hetzer; Lior Huli; Joshua S. Hooge

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Ronald Nasman

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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Anton J. Devilliers

Tokyo Electron

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James Grootegoed

Tokyo Electron

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David Travis

Tokyo Electron

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Douglas M. Trickett

Tokyo Electron

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Frank M. Cerio

Tokyo Electron

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Joshua S. Hooge

Tokyo Electron

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Lior Huli

Tokyo Electron

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Mirko Vukovic

Tokyo Electron

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