Atsushi Ogishima | Researchain

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Featured researches published by Atsushi Ogishima.

Archive | 1996

Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same

Jun Murata; Yoshitaka Tadaki; Hiroko Kaneko; Toshihiro Sekiguchi; Hiroyuki Uchiyama; Hisashi Nakamura; Toshio Maeda; Osamu Kasahara; Hiromichi Enami; Atsushi Ogishima; Masaki Nagao; Michimasa Funabashi; Yasuo Kiguchi; Masayuki Kojima; Atsuyoshi Koike; Hiroyuki Miyazawa; Masato Sadaoka; Kazuya Kadota; Tadashi Chikahara; Kazuo Nojiri; Yutaka Kobayashi

Archive | 2004

Semiconductor integrated circuitry and method for manufacturing the circuitry

Kozo Watanabe; Atsushi Ogishima; Masahiro Moniwa; Syunichi Hashimoto; Masayuki Kojima; Kiyonori Ohyu; Kenichi Kuroda; Nozomu Matsuda

Archive | 2004

Semiconductor integrated circuit device and the process of manufacturing the same having poly-silicon plug, wiring trenches and bit lines formed in the wiring trenches having a width finer than a predetermined size

Hiroyuki Uchiyama; Atsushi Ogishima; Shoji Shukuri

Archive | 2000

Method of forming a MISFET device with a bit line completely surrounded by dielectric

Hiroyuki Uchiyama; Atsushi Ogishima; Shoji Shukuri

Archive | 1999

Semiconductor integrated circuit device and the method of producing the same

Atsushi Ogishima; Kiyonori Ohyu

Archive | 2003

Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing

Norio Suzuki; Hiroyuki Ichizoe; Masayuki Kojima; Keiji Okamoto; Shinichi Horibe; Kozo Watanabe; Yasuko Yoshida; Shuji Ikeda; Akira Takamatsu; Norio Ishitsuka; Atsushi Ogishima; Maki Shimoda

Archive | 2000