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Atsushi Ookouchi

Tokyo Electron

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Publication

Featured researches published by Atsushi Ookouchi.

Archive | 2011

Developing device and developing method

Taro Yamamoto; Kousuke Yoshihara; Hideharu Kyouda; Hirofumi Takeguchi; Atsushi Ookouchi

Archive | 2004

Development device and development method

Atsushi Ookouchi; Taro Yamamoto; Hirofumi Takeguchi; Hideharu Kyouda; Kousuke Yoshihara

Archive | 2005

Developing apparatus and method

Taro Yamamoto; Atsushi Ookouchi; Hirofumi Takeguchi; Kousuke Yoshihara

Archive | 2002

Method for developing processing and apparatus for supplying developing solution

Kousuke Yoshihara; Keiichi Tanaka; Taro Yamamoto; Hideharu Kyouda; Hirofumi Takeguchi; Atsushi Ookouchi

Archive | 2010

Resist pattern slimming treatment method

Toyohisa Tsuruda; Yoshihiro Kondo; Atsushi Ookouchi; Masahiro Yamamoto

Archive | 2011

SUBSTRATE CLEANING APPARATUS, COATING AND DEVELOPING APPARATUS HAVING THE SAME AND SUBSTRATE CLEANING METHOD

Atsushi Ookouchi; Junji Kume

Proceedings of SPIE | 2010

The optimizations of resist shrink process using track-based technology

Yoshihiro Kondo; Atsushi Ookouchi; Toyohisa Tsuruda; Masahiro Yamamoto; Takashi Saito; Tsuyoshi Shibata; Satoru Shimura; Fumiko Iwao; Ben Rathsack; Michael A. Carcasi

Archive | 2010

DEVELOPING APPARATUS, RESIST PATTERN FORMING METHOD AND STORAGE MEDIUM

Masahiro Fukuda; Atsushi Ookouchi; Taro Yamamoto

Archive | 2017

Developing method, developing apparatus and storage medium

Taro Yamamoto; Hirofumi Takeguchi; Atsushi Ookouchi; Kousuke Yoshihara

Archive | 2007

Development device and developing method

Atsushi Ookouchi; Taro Yamamoto; Hirofumi Takeguchi; Hideharu Kyouda; Kousuke Yoshihara

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Collaboration

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Taro Yamamoto

Tokyo Electron

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Kousuke Yoshihara

Tokyo Electron

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Hirofumi Takeguchi

Tokyo Electron

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Hideharu Kyouda

Tokyo Electron

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Masahiro Fukuda

Tokyo Electron

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Masahiro Yamamoto

Tokyo Electron

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Toyohisa Tsuruda

Tokyo Electron

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Yoshihiro Kondo

Tokyo Electron

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Akihiro Kubo

Tokyo Electron

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Fumiko Iwao

Tokyo Electron

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