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Barney M. Cohen

Applied Materials

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Publication

Featured researches published by Barney M. Cohen.

Archive | 1999

Reactive plasma etch cleaning of high aspect ratio openings

Barney M. Cohen; Jingang Su; Kenny King-Tai Ngan

Archive | 2002

Precleaning process for metal plug that minimizes damage to low-κ dielectric

Barney M. Cohen; Suraj Rengarajan; Kenny King-Tai Ngan

Archive | 1998

Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers

Ted Guo; Barney M. Cohen; Amrita Verma

Archive | 1995

Inductively coupled plasma reactor with top electrode for enhancing plasma ignition

John C. Forster; Barney M. Cohen; Bradley O. Stimson; George Proulx

Archive | 1999

Cleaning contact with successive fluorine and hydrogen plasmas

Barney M. Cohen; Jingang Su; Kenny King-Tai Ngan; Jr-Jyan Chen

Archive | 1998

Plasma preclean with argon, helium, and hydrogen gases

Barney M. Cohen; Kenny King-Tai Ngan; Xiangbing Li

Archive | 2000

Methods of pre-cleaning dielectric layers of substrates

Barney M. Cohen; Peijun Ding; Xiangbing Li; Kenny King-Tai Ngan; Suraj Rengarajan

Archive | 1995

R.F. plasma reactor with larger-than-wafer pedestal conductor

Yoichiro Tanaka; Megumi Taoka; Barney M. Cohen

Archive | 1998

Pedestal insulator for a pre-clean chamber

Mohamed Al-Sharif; Bradley O. Stimson; Debabrata Ghosh; Barney M. Cohen; Kenny King-Tai Ngan; Murali Narasimhan

Archive | 1996

Plasma reactor and pedestal for supporting semiconductor substrate in a plasma reactor

Yoichiro Tanaka; Megumi Taoka; Barney M. Cohen

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Collaboration

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Kenny King-Tai Ngan

Applied Materials

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Bradley O. Stimson

Applied Materials

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Jingang Su

Applied Materials

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George Proulx

Applied Materials

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John C. Forster

Applied Materials

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Jr-Jyan Chen

Applied Materials

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Suraj Rengarajan

Applied Materials

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Xiangbing Li

Applied Materials

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Gilbert Hausmann

Applied Materials

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Megumi Taoka

Applied Materials

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