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Dive into the research topics where Bi-Ming Yen is active.

Publication


Featured researches published by Bi-Ming Yen.


Archive | 2003

Uniform etch system

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt


Archive | 2002

Gas distribution system with tuning gas

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt


Archive | 2005

Methods for the optimization of substrate etching in a plasma processing system

Jisoo Kim; Binet Worsham; Bi-Ming Yen; Peter Loewenhardt


Archive | 2004

Waferless automatic cleaning after barrier removal

Xiaoqiang Sean Yao; Bi-Ming Yen; Taejoon Han; Peter Loewenhardt


Archive | 2008

In-situ photoresist strip during plasma etching of active hard mask

Sangjun Cho; Tom Choi; Taejoon Han; Sean Kang; Prabhakara Gopaladasu; Bi-Ming Yen


Archive | 2004

Methods and apparatus for inspecting contact openings in a plasma processing system

Jisoo Kim; Sangheon Lee; Sean Kang; Binet Worsham; Bi-Ming Yen; Reza Sadjadi; Peter Loewenhardt


Archive | 2003

Gas distribution apparatus and method for uniform etching

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt


china semiconductor technology international conference | 2011

Etch and Wet Clean Challenges and Joint Optimization

Bi-Ming Yen; Johnny Lin; Chris Lee; Mike Hegarty; Peter Loewenhardt


Archive | 2010

Methods for substrate etching in a plasma processing system

Binet Worsham; Jisoo Kim; Bi-Ming Yen; Loewenhardt Peter K


Archive | 2010

Method for low-k dielectric etch with reduced damage

Bing Ji; Kenji Takeshita; Andrew D. Bailey; Eric Hudson; Maryam Moravej; Stephen M. Sirard; Jungmin Ko; Daniel Le; Robert C. Hefty; Yu Cheng; Gerardo Delgadino; Bi-Ming Yen

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