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Peter Loewenhardt

Lam Research

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Publication

Featured researches published by Peter Loewenhardt.

international symposium on plasma process-induced damage | 2002

Wafer arcing phenomena and resolution through a capacitively coupled low gap plasma reactor

Andreas Fischer; D. Pirkle; D. Wu; Peter Loewenhardt; J. Tietz; J. Marks

Electromagnetic simulations have been performed on a hypothetical device structure showing that electric field strengths around large metal structures can be close to electric breakdown, in particular in low-k materials. A plasma reactor design is presented leading to a large window of operation, free of wafer arcing.

Archive | 2003

Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift

Andreas Fischer; Peter Loewenhardt

Archive | 2007

Preventing damage to low-k materials during resist stripping

SiYi Li; Helen Zhu; Howard Dang; Thomas S. Choi; Peter Loewenhardt

Archive | 2002

Plasma processor with electrode simultaneously responsive to plural frequencies

Vahid Vahedi; Peter Loewenhardt; Albert Ellingboe; Andras Kuthi; Andreas Fischer

Archive | 2003

Uniform etch system

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 2002

Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power Density conditions

Andreas Fischer; Dave Trussell; Bill Kennedy; Peter Loewenhardt

Archive | 2003

Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode

Andreas Fischer; William S. Kennedy; Peter Loewenhardt; David Trussell

Archive | 2003

RF pulsing of a narrow gap capacitively coupled reactor

Peter Loewenhardt; Mukund Srinivasan; Andreas Fischer

Archive | 2002

Gas distribution system with tuning gas

Dean J. Larson; Babak Kadkhodayan; Di Wu; Kenji Takeshita; Bi-Ming Yen; Xingcai Su; William M. Denty; Peter Loewenhardt

Archive | 2004

Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition

Seokmin Yun; Ji Zhu; Peter Cirigliano; Sangheon Lee; Thomas S. Choi; Peter Loewenhardt; Mark Wilcoxson; Reza Sadjadi; Eric Hudson; James V. Tietz

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Andreas Fischer

Lam Research

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Bi-Ming Yen

Lam Research

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Xingcai Su

Lam Research

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Babak Kadkhodayan

Lam Research

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Bill Kennedy

Lam Research

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Dean J. Larson

Lam Research

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Di Wu

Lam Research

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Helen Zhu

Lam Research

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Kenji Takeshita

Lam Research

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Mukund Srinivasan

Lam Research

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