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Biraja P. Kanungo

Applied Materials

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Publication

Featured researches published by Biraja P. Kanungo.

Archive | 2012

Plasma resistant ceramic coated conductive article

Jennifer Y. Sun; Biraja P. Kanungo; Ren-Guan Duan; Hamid Noorbakhsh; Junhan Yuh; Dmitry Lubomirsky

Archive | 2013

Ceramic coated article and process for applying ceramic coating

Jennifer Y. Sun; Biraja P. Kanungo; Ren-Guan Duan; Sumit Agarwal; Dmitry Lubomirsky

Archive | 2013

Chemistry compatible coating material for advanced device on-wafer particle performance

Jennifer Y. Sun; Biraja P. Kanungo; Dmitry Lubomirsky

Archive | 2013

Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics

Jennifer Y. Sun; Ren-Guan Duan; Biraja P. Kanungo; Dmitry Lubomirsky

Archive | 2013

Innovative top-coat approach for advanced device on-wafer particle performance

Jennifer Y. Sun; Biraja P. Kanungo; Dmitry Lubomirsky; Vahid Fioruzdor

Archive | 2013

Plasma spray coating process enhancement for critical chamber components

Jennifer Y. Sun; Biraja P. Kanungo; Ren-Guan Duan; Benjamin Schwarz

Archive | 2014

Plasma erosion resistant rare-earth oxide based thin film coatings

Jennifer Y. Sun; Biraja P. Kanungo; Vahid Firouzdor; Tom K. Cho

Archive | 2013

Substrate support assembly having a plasma resistant protective layer

Jennifer Y. Sun; Senh Thach; Biraja P. Kanungo; Vahid Firouzdor

Archive | 2015

ION ASSISTED DEPOSITION TOP COAT OF RARE-EARTH OXIDE

Jennifer Y. Sun; Biraja P. Kanungo; Vahid Firouzdor

Archive | 2014

AEROSOL DEPOSITION COATING FOR SEMICONDUCTOR CHAMBER COMPONENTS

Jennifer Y. Sun; Biraja P. Kanungo; Tom K. Cho; Ying Zhang

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Jennifer Y. Sun

Applied Materials

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Vahid Firouzdor

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Ying Zhang

Applied Materials

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Tom K. Cho

Applied Materials

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Yikai Chen

Applied Materials

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Ren-Guan Duan

Applied Materials

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Vahid Fioruzdor

Applied Materials

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Anisul Khan

Applied Materials

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Benjamin Schwarz

Applied Materials

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