Bongim Jun

Proton irradiation effects on GaN-based high electron-mobility transistors with Si-doped Al/sub x/Ga/sub 1-x/N and thick GaN cap Layers

1.8 MeV proton radiation-induced degradation in high electron mobility transistors with Si-doped Al/sub x/Ga/sub 1-x/N and thick GaN cap layers is studied up to a fluence of 1/spl times/10/sup 15/ protons/cm/sup 2/. The thick GaN cap layer reduces sheet charge modulation induced by the surface states, as it electrostatically separates the active device layers from the surface, thereby enhancing the device performance. The devices exhibit good tolerance up to 10/sup 14/ protons/cm/sup 2/, with displacement damage being the primary degradation mechanism. Charged defect centers introduced by proton radiation in the active device layers degrade carrier mobility and sheet carrier density. Proton radiation alters the barrier height at the Schottky gate and increases the resistance of the thin film structure.

Charge separation techniques for irradiated pseudo-MOS SOI transistors

Pseudo-metal-oxide-semiconductor (MOS) silicon-on-insulator (SOI) transistors are used to study the total ionizing dose response of buried oxides. The concentrations of radiation-induced oxide-trap and interface-trap charge are separated using midgap and dual-transistor charge separation analysis techniques. Dual-transistor analysis is shown to be especially well suited for charge separation of pseudo-MOSFETs (/spl Psi/-MOSFETs) because the electron conduction mode of this simple point-contact device resembles an nMOS transistor, and the hole conduction mode resembles a pMOS transistor. That this is a single device ensures that the dual-transistor assumption of equal oxide-trap charge in otherwise identical n and pMOS transistors is satisfied automatically. Both electron and hole conduction current-voltage (I-V) traces must extrapolate to a common, physically realistic midgap voltage; this is employed as a test for the self-consistency of /spl Psi/-MOSFET data. Charge separation performed using midgap and dual-transistor analyses show good agreement for the devices employed in this paper.

An Investigation of Dose Rate and Source Dependent Effects in 200 GHz SiGe HBTs

We present an investigation of the observed variations in the total dose tolerance of the emitter-base spacer and shallow trench isolation oxides in a commercial 200 GHz SiGe HBT technology. Proton, gamma, and X-ray irradiations at varying dose rates are found to produce drastically different degradation signatures at the various oxide interfaces. Extraction and analysis of the radiation-induced excess base current, as well as low-frequency noise, are used to probe the underlying physical mechanisms. Two-dimensional calibrated device simulations are employed to correlate the observed results to the spatial distributions of carrier recombination in forward- and inverse-mode operation for both pre- and post-irradiation levels. Possible explanations of our observations are offered and the implications for hardness assurance testing are discussed

A comparison of gamma and proton radiation effects in 200 GHz SiGe HBTs

We present the results of gamma irradiation on third-generation, 200 GHz SiGe HBTs. Pre- and post-radiation dc figures-of-merit are used to quantify the tolerance of the raised extrinsic base structure to Co-60 gamma rays for varying device geometries. Additionally, the impact of technology scaling on the observed radiation response is addressed through comparisons to second generation, 120 GHz SiGe HBTs. Comparisons to previous proton-induced degradation results in these 200 GHz SiGe HBTs are also made, and indicate that the STI isolation oxide of the device shows increased degradation following Co-60 irradiation. The EB spacer oxide, on the other hand, demonstrates increased susceptibility to proton damage. Low dose rate proton testing was also performed and indicate that although there is a proton dose rate effect present in these devices, it cannot fully explain the observed trends. Similar trends have previously been observed for buried oxides and isolation oxides in several MOS technologies and have been attributed to increased charge yield in these oxides for 1.2 MeV Co-60 gamma rays when compared to 63 MeV protons.

The Effects of Irradiation Temperature on the Proton Response of SiGe HBTs

We compare, for the first time, the effects of 63 MeV protons on 1st generation and 3rd generation SiGe HBTs irradiated at both liquid nitrogen temperature (77 K) and at room temperature (300 K). The 1st generation SiGe HBTs irradiated at 77 K show less degradation than when irradiated at 300 K. Conversely, the 3rd generation SiGe HBTs exhibits an opposite trend, and the devices irradiated at 77 K show enhanced degradation compared to those irradiated at 300 K. The emitter-base spacer regions for these two SiGe technologies are fundamentally different in construction, and apparently are responsible for the observed differences in temperature-dependent radiation response. At practical circuit biases, both SiGe technology generations show only minimal degradation for both at 77 K and 300 K exposure, to Mrad dose levels, and are thus potentially useful for electronics applications requiring simultaneous cryogenic temperature operation and significant total dose radiation exposure

Characterization of multiple Si∕SiO2 interfaces in silicon-on-insulator materials via second-harmonic generation

Charge generation, transport, and recombination processes in UNIBOND® silicon-on-insulator wafers are studied via an optical second-harmonic generation (SHG) technique. The electric fields at the interfaces vary with time due to charge trapping. The presence of a thin native oxide layer on the top Si film contributes significantly to the SH intensity due to the strong time-dependent electric field generated by electrons transported to the surface. For the thick buried oxide, the electric field is primarily due to carrier trapping at the interface, and it varies with time weakly. The SHG signals depend strongly on the externally applied electric field, which can differentiate the contribution of each interface to the total SH signal.

Charge trapping in irradiated SOI wafers measured by second harmonic generation

Total dose effects on silicon on insulator (SOI) UNIBOND wafers are studied via optical second harmonic generation (SHG). This technique is qualitatively compared with the pseudo-MOSFET technique for monitoring charges at the interfaces. Optical and electrical methods are combined to separate the contribution of the signal from each interface to the total SHG intensity. Radiation-induced oxide and interface traps increase the interface fields as determined from the SHG signals and the results are compared with electrical measurements.

Total dose effects on double gate fully depleted SOI MOSFETs

Total ionizing dose effects on fully-depleted (FD) silicon-on-insulator (SOI) transistors are studied when the devices are operated in single gate (SG) and double gate (DG) mode. The devices exhibit superiority in mobility and drain current when operated in DG mode compared to SG mode. Moreover, the dc characteristics of DG operated device are less vulnerable to total dose radiation induced damage. In particular, radiation-induced interface traps have less electrical effect in DG mode operation.

The Effects of X-Ray and Proton Irradiation on a 200 GHz/90 GHz Complementary

We investigate the effects of both X-ray and proton irradiation on a novel 200 GHz/90 GHz (npn/pnp) complementary SiGe:C HBT technology. The DC forward mode total dose tolerance of the pnp HBTs is shown to exceed that of the npn HBTs by a significant margin after being subjected to both 63-MeV proton and 10-keV X-ray sources, while the AC characteristics of both devices exhibit no degradation up to X-ray doses as high as 1.8 Mrad(SiO2). Pre- and post-irradiation results from a current feedback operational amplifier implemented in this technology and irradiated up to a dose of 1.8 Mrad(SiO2) are presented, showing no degradation in performance metrics under two low current density bias configurations.

(npn + pnp)

The impact of 63.3 MeV proton and 10 keV X-ray irradiation on the DC and AC performance of complementary SiGe HBTs on thick-film SOI is investigated. Proton and X-ray induced changes in the forward and inverse Gummel characteristics, the output characteristics, and avalanche multiplication are reported for both npn and pnp SiGe HBTs, at both room temperature (300 K) and at cryogenic temperatures (down to 30 K). Comparison of room temperature and cryogenic data suggests interface trap formation at two distinct physical locations in the transistors. Experimental data and calibrated TCAD simulations are used to compare the radiation response of both thick-film SOI devices and thin-film SOI SiGe HBTs.