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Brian Haas

Applied Materials

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Publication

Featured researches published by Brian Haas.

Archive | 2000

Thermally processing a substrate

Ryan C. Boas; Ajit Balakrishna; Benjamin Bierman; Brian Haas; Dean Jennings; Wolfgang Aderhold

Archive | 1997

Co-rotating edge ring extension for use in a semiconductor processing chamber

Benjamin Bierman; Meredith J. Williams; David S. Ballance; Brian Haas; Paul Deaton; James V. Tietz

Archive | 1997

Method and apparatus for achieving temperature uniformity of a substrate

Meredith J. Williams; David S. Ballance; Benjamin Bierman; Paul Deaton; Brian Haas; Nobuyuki Takahashi; James V. Tietz

Archive | 2002

Stepped reflector plate

Dean Jennings; Joseph M. Ranish; Brian Haas; Ajit Balakrishna; Sundar Ramamurthy; Aaron Muir Hunter; Mark Yam

Archive | 2004

Tailored temperature uniformity

Joseph M. Ranish; Ravi Jallepally; Sundar Ramamurthy; Raman Achutharaman; Brian Haas; Aaron Muir Hunter

Archive | 1996

Method for gaseous substrate support

David S. Ballance; Benjamin Bierman; James V. Tietz; Brian Haas

Archive | 1997

Method and apparatus for purging the back side of a substrate

David S. Ballance; Benjamin Bierman; Paul Deaton; Brian Haas; James V. Tietz; Meredith J. Williams

Archive | 2008

Controlled annealing method

Joseph M. Ranish; Ravi Jallepally; Sundar Ramamurthy; Vedapuram S. Achutharaman; Brian Haas; Aaron Muir Hunter; Wolfgang Aderhold

Archive | 1997

Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system

Anthony White; Satheesh Kuppurao; Brian Haas

Archive | 1997

Reflector cover for a semiconductor processing chamber

Benjamin Bierman; David S. Ballance; James V. Tietz; Brian Haas; Meredith J. Williams; Paul Deaton

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Collaboration

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Benjamin Bierman

Applied Materials

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James V. Tietz

Applied Materials

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David S. Ballance

Applied Materials

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Meredith J. Williams

Applied Materials

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Anthony White

Applied Materials

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Paul Deaton

Applied Materials

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Satheesh Kuppurao

Applied Materials

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Sundar Ramamurthy

Applied Materials

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Aaron Muir Hunter

Applied Materials

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Dean Jennings

Applied Materials

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