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Brian Sy-Yuan Shieh

Applied Materials

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Publication

Featured researches published by Brian Sy-Yuan Shieh.

Archive | 2003

System level in-situ integrated dielectric etch process particularly useful for copper dual damascene

Chang-Lin Hsieh; Diana Xiaobing Ma; Brian Sy-Yuan Shieh; Gerald Zheyao Yin; Jennifer Y. Sun; Senh Thach; Lee Luo; Claes Bjorkman

Archive | 2009

Gas distribution blocker apparatus

Lun Tsuei; Alan Tso; Tom K. Cho; Brian Sy-Yuan Shieh

Archive | 2009

Gas distribution showerhead skirt

Tom K. Cho; Brian Sy-Yuan Shieh; Zheng Yuan

Archive | 2010

Method and apparatus for remote plasma source assisted silicon-containing film deposition

Annamalai Lakshmanan; Jun Fang; Jianshe Tang; Dustin W. Ho; Francimar Schmitt; Alan Tso; Tom K. Cho; Brian Sy-Yuan Shieh; Hari Ponnekanti; Chris Eberspacher; Zheng Yuan

Archive | 2009

Showerhead and shadow frame

Tom K. Cho; Zheng Yuan; Brian Sy-Yuan Shieh

Archive | 2009

Adjustable gas distribution apparatus

Lin Zhang; Lun Tsuei; Alan Tso; Tom K. Cho; Brian Sy-Yuan Shieh

Archive | 2009

APPARATUS AND METHOD FOR PREVENTING PROCESS SYSTEM CONTAMINATION

Tom K. Cho; Lun Tsuei; Kuan-Yuan Peng; Kyle S. Reinke; Brian Sy-Yuan Shieh

Archive | 2009

Multiple gas feed apparatus and method

Alan Tso; Lun Tsuei; Tom K. Cho; Brian Sy-Yuan Shieh

Archive | 2009

Appareil et procédé à multiples alimentations en gaz

Alan Tso; Lun Tsuei; Tom K. Cho; Brian Sy-Yuan Shieh

Archive | 2003

An integrated in-situ etch process performed in a multichamber substrate processing system

Claes Bjorkman; Chang-Lin Hsieh; Lee Luo; Diana Xiaobing Ma; Brian Sy-Yuan Shieh; Jennifer Y. Sun; Senh Thach; Gerald Zheyao Yin

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Tom K. Cho

Applied Materials

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Alan Tso

Applied Materials

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Lun Tsuei

Applied Materials

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Chang-Lin Hsieh

Applied Materials

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Claes Bjorkman

Applied Materials

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Diana Xiaobing Ma

Applied Materials

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Gerald Zheyao Yin

Applied Materials

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Jennifer Y. Sun

Applied Materials

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Lee Luo

Applied Materials

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Senh Thach

Applied Materials

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