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Stephen C. Johnson

University of Texas System

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Publication

Featured researches published by Stephen C. Johnson.

Archive | 2000

High precision orientation alignment and gap control stages for imprint lithography processes

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Imprint lithography templates having alignment marks

Todd Bailey; Stephen C. Johnson; Matthew Colburn; Byung-Jin Choi; Britain Smith; John G. Ekerdt; Carlton Grant Willson; Sidlgata V. Sreenivasan

Archive | 2003

Method of separating a template from a substrate during imprint lithography

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Apparatus to orientate a body with respect to a surface

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2003

Method of manufacturing a vacuum chuck used in imprint lithography

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Method of orientating a template with respect to a substrate in response to a force exerted on the template

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Apparatus to control displacement of a body spaced-apart from a surface

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2005

Remote center compliant flexure device

Byung-Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Method to control the relative position between a body and a surface

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2006

Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing

C. Grant Willson; Frank Palmieri; Yukio Nishimura; Stephen C. Johnson; Michael D. Stewart

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Collaboration

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Sidlgata V. Sreenivasan

University of Texas System

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Byung Jin Choi

University of Texas System

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Byung-Jin Choi

University of Texas System

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Britain Smith

University of Texas System

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C. Grant Willson

University of Texas System

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Carlton Grant Willson

University of Texas System

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Frank Palmieri

University of Texas System

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John G. Ekerdt

University of Texas System

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Matthew Colburn

University of Texas System

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Michael D. Stewart

University of Texas System

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