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-An Chen

Applied Materials

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Publication

Featured researches published by -An Chen.

Archive | 2000

Integration of remote plasma generator with semiconductor processing chamber

Karthik Janakiraman; Kelly Fong; Chen-An Chen; Paul Le; Rong Pan; Shankar Venkataraman

Archive | 2005

CVD plasma assisted lower dielectric constant SICOH film

Seon-Mee Cho; Peter Wai-Man Lee; Chi-I Lang; Dian Sugiarto; Chen-An Chen; Li-Qun Xia; Shankar Venkataraman; Ellie Yieh

Archive | 2001

Method and apparatus for fluid flow control

Juan Carlos Rocha-Alvarez; Chen-An Chen; Shankar Venkataraman

Archive | 2005

Method for cleaning a process chamber

Yi Zheng; Vinita Singh; Srinivas D. Nemani; Chen-An Chen; Ju-hyung Lee; Shankar Venkataraman

Archive | 2003

Method and apparatus for processing semiconductor substrates with hydroxyl radicals

Himanshu Pokharna; Shankar Chandran; Srinivas D. Nemani; Chen-An Chen; Francimar Campana; Ellie Yieh; Li-Qun Xia

Archive | 2001

Purge heater design and process development for the improvement of low k film properties

Juan Carlos Rocha-Alvarez; Chen-An Chen; Ellie Yieh; Shankar Venkataraman

Archive | 2001

LOW PROFILE THICK FILM HEATERS IN MULTI-SLOT BAKE CHAMBER

Yen-Kun Victor Wang; Mark Fodor; Chen-An Chen; Himanshu Pokharna; Son T. Nguyen; Kelly Fong; Inna Shmurun

Archive | 1998

Method and apparatus for verifying the calibration of semiconductor processing equipment

Won B. Bang; Chen-An Chen

Archive | 2001

Clog resistant injection valve

Chen-An Chen; Won B. Bang

Archive | 1999

CORROSION RESISTANT COATING

Won B. Bang; Chen-An Chen; Shankar Venkataraman; Ajay Bhatnagar

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Collaboration

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Shankar Venkataraman

Applied Materials

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Won B. Bang

Applied Materials

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Ellie Yieh

Applied Materials

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Li-Qun Xia

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Ajay Bhatnagar

Applied Materials

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Francimar Campana

Applied Materials

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Himanshu Pokharna

Applied Materials

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Juan Carlos Rocha-Alvarez

Applied Materials

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Kelly Fong

Applied Materials

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