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Eric R. Cobb

Varian Semiconductor

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Publication

Featured researches published by Eric R. Cobb.

Archive | 2008

DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY

John Koo; David J. Twiss; Chris Campbell; Frank Sinclair; Alexander S. Perel; Craig R. Chaney; Wilhelm P. Platow; Eric R. Cobb

Archive | 2006

Technique for providing an inductively coupled radio frequency plasma flood gun

Peter F. Kurunczi; Russell J. Low; Alexander S. Perel; Eric R. Cobb; Ethan Adam Wright

Archive | 2009

Ion source cleaning method and apparatus

Costel Biloiu; Craig R. Chaney; Eric R. Cobb; Bon-Woong Koo; Wilhelm P. Platow

Archive | 2006

Technique for improving performance and extending lifetime of inductively heated cathode ion source

Eric R. Cobb; Russell J. Low; Craig R. Chaney; Leo V. Klos

Archive | 2005

Source arc chamber for ion implanter having repeller electrode mounted to external insulator

Russell J. Low; Eric R. Cobb; Joseph C. Olson; Leo V. Klos

Archive | 2008

Techniques for providing ion source feed materials

Christopher R. Hatem; Craig R. Chaney; Eric R. Cobb; Joseph C. Olson; Chris Campbell

Archive | 2006

Wafer charge monitoring

Russell J. Low; George M. Gammel; Peter F. Kurunczi; Eric R. Cobb

Archive | 2010

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRANSPARENCY ELECTRODES

James Buff; Svetlana Radovanov; Bon-Woong Koo; Wilhelm P. Platow; Frank Sinclair; D. Jeffrey Lischer; Craig R. Chaney; Steven C. Borichevsky; Eric R. Cobb; Mayur Jagtap; Kenneth H. Purser; Victor M. Benveniste; Shardul Patel

Archive | 2013

Lifetime ion source

Bon-Woong Koo; William T. Levay; Richard M. White; Eric R. Cobb

Archive | 2005

Indirectly heated cathode clamp system and method

Stephen E. Krause; Eric R. Cobb; Russell J. Low

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Russell J. Low

Varian Semiconductor

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Craig R. Chaney

Varian Semiconductor

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Bon-Woong Koo

Varian Semiconductor

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Wilhelm P. Platow

Varian Semiconductor

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Alexander S. Perel

Varian Semiconductor

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Frank Sinclair

Applied Materials

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Joseph C. Olson

Varian Semiconductor

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Peter F. Kurunczi

Varian Semiconductor

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Chris Campbell

Varian Semiconductor

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D. Jeffrey Lischer

Varian Semiconductor

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