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Wilhelm P. Platow

Varian Semiconductor

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Publication

Featured researches published by Wilhelm P. Platow.

Archive | 2008

DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY

John Koo; David J. Twiss; Chris Campbell; Frank Sinclair; Alexander S. Perel; Craig R. Chaney; Wilhelm P. Platow; Eric R. Cobb

Archive | 2009

Ion source and a method for in-situ cleaning thereof

Bon-Woong Koo; Christopher R. Campbell; Craig R. Chaney; Robert C. Lindberg; Wilhelm P. Platow; Alexander S. Perel

Archive | 2010

TECHNIQUES FOR GENERATING UNIFORM ION BEAM

Wilhelm P. Platow; Neil J. Bassom; Peter F. Kurunczi; Alexander S. Perel; Craig R. Chaney

Archive | 2008

Method and apparatus for controlling beam current uniformity in an ion implanter

Rajesh Dorai; Peter F. Kurunczi; Alexander S. Perel; Wilhelm P. Platow

Archive | 2009

Ion source cleaning method and apparatus

Costel Biloiu; Craig R. Chaney; Eric R. Cobb; Bon-Woong Koo; Wilhelm P. Platow

Archive | 2009

Ion source cleaning end point detection

Wilhelm P. Platow; Neil J. Bassom; Peter F. Kurunczi; Alexander S. Perel; Craig R. Chaney

Archive | 2008

Techniques for optical ion beam metrology

Alexander S. Perel; Wilhelm P. Platow; Craig R. Chaney; Frank Sinclair; Tyler Rockwell

Archive | 2010

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRANSPARENCY ELECTRODES

James Buff; Svetlana Radovanov; Bon-Woong Koo; Wilhelm P. Platow; Frank Sinclair; D. Jeffrey Lischer; Craig R. Chaney; Steven C. Borichevsky; Eric R. Cobb; Mayur Jagtap; Kenneth H. Purser; Victor M. Benveniste; Shardul Patel

Archive | 2004

Method and apparatus for the production of purified liquids and vapors

Wilhelm P. Platow; John B. Cracchiolo; Stanislav S. Todorov; Jaime M. Reyes

Archive | 2007

Determining ion beam parallelism using refraction method

Raymond Callahan; David Olson; Wilhelm P. Platow; Stanislav S. Todorov

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Craig R. Chaney

Varian Semiconductor

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Alexander S. Perel

Varian Semiconductor

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Frank Sinclair

Varian Semiconductor

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Eric R. Cobb

Varian Semiconductor

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Bon-Woong Koo

Varian Semiconductor

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Peter F. Kurunczi

Varian Semiconductor

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Stanislav S. Todorov

Varian Semiconductor

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D. Jeffrey Lischer

Varian Semiconductor

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David Olson

Varian Semiconductor

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James Buff

Varian Semiconductor

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