Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Dale K. Stone is active.

Publication


Featured researches published by Dale K. Stone.


Archive | 2011

High Conductivity Electrostatic Chuck

David E. Suuronen; Lyudmila Stone; Julian G. Blake; Dale K. Stone; Richard A. Cooke; Steven Donnell; Chandra Venkatraman


Archive | 2010

Removal of charge between a substrate and an electrostatic clamp

Dale K. Stone; Lyudmila Stone; David E. Suuronen; Klaus Petry; Julian G. Blake


Archive | 2007

Electrostatic chuck with separated electrodes

Julian G. Blake; Dale K. Stone; Lyudmila Stone; David E. Suuronen


Archive | 2011

PLATEN TO CONTROL CHARGE ACCUMULATION

Dale K. Stone; Lyudmila Stone; Julian G. Blake; Frederick B. Ammon; David E. Suuronen


Archive | 2009

In-vacuum protective liners

Lyudmila Stone; Julian G. Blake; Dale K. Stone; Ron S. Serisky


Archive | 2008

EMBOSSED ELECTROSTATIC CHUCK

D. Jeffrey Lischer; Dale K. Stone; Lyudmila Stone; David E. Suuronen; Julian G. Blake


Archive | 2011

Triboelectric charge controlled electrostatic clamp

Julian G. Blake; Dale K. Stone; Lyudmila Stone; David E. Suuronen; Shigeo Oshiro


Archive | 2011

High Surface Resistivity Electrostatic Chuck

Richard A. Cooke; Dale K. Stone; Lyudmila Stone; Julian G. Blake; David E. Suuronen


Archive | 2009

PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A METHOD THEREOF

David E. Suuronen; Dale K. Stone; Shigeo Oshiro; Arthur P. Riaf; Edward D. MacIntosh


Archive | 2007

Techniques for handling substrates

Dale K. Stone; Lyudmila Stone; Julian G. Blake; Suneethi Gudapati

Collaboration


Dive into the Dale K. Stone's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge