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Alan F. Morrison

Applied Materials

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Publication

Featured researches published by Alan F. Morrison.

Archive | 1996

Chemical vapor deposition chamber

Lawrence Chung-Lai Lei; Ilya Perlov; Karl A. Littau; Alan F. Morrison; Mei Chang; Ashok K. Sinha

Archive | 1994

Chemical vapor deposition chamber with a purge guide

Lawrence C. Lei; Ilya Perlov; Karl A. Littau; Alan F. Morrison; Mei Chang; Ashok K. Sinha

Archive | 1996

Resistance heated stem mounted aluminum susceptor assembly

Michio Aruga; Atsunobu Ohkura; Akihiko Saito; Kenji Suzuki; Kenichi Taguchi; Dale R. DuBois; Alan F. Morrison

Archive | 1994

Chemical vapor deposition of a thin film onto a substrate

Ashok K. Sinha; Mei Chang; Ilya Perlov; Karl A. Littau; Alan F. Morrison; Lawrence Chung-Lai Lei

Archive | 1997

CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER

Michal Danek; Marvin Liao; Eric A. Englhardt; Mei Chang; Yeh-Jen Kao; Dale R. DuBois; Alan F. Morrison

Archive | 1994

Compound clamp ring for semiconductor wafers

Semyon Sherstinsky; Mei Chang; Charles C. Harris; Alan F. Morrison; Virendra V. S. Rana; James F. Roberts; Ashok K. Sinha; Simon W. Tam

Archive | 1996

Heater with shadow ring and purge above wafer surface

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei; Dale R. DuBois

Archive | 1994

Substrate support shield in wafer processing reactors

Dale R. DuBois; Alan F. Morrison; Richard A. Marsh; Mei Chang

Archive | 1995

Removable ring for controlling edge deposition in substrate processing apparatus

Salvador P. Umotoy; Alan F. Morrison; Karl A. Littau; Richard A. Marsh; Lawrence Chung-Lai Lei

Archive | 1993

Lift fingers for substrate processing apparatus

Sandy M. Chew; Shane D. Clark; Ron Rose; Dale R. DuBois; Cissy Leung; Alan F. Morrison; Manus Wong

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Dale R. DuBois

Applied Materials

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Mei Chang

Applied Materials

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Richard A. Marsh

Applied Materials

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Karl A. Littau

Applied Materials

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Lawrence Chung-Lai Lei

Applied Materials

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Ashok K. Sinha

Applied Materials

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Ilya Perlov

Applied Materials

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Salvador P. Umotoy

Applied Materials

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Akihiko Saito

Applied Materials

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Atsunobu Ohkura

Applied Materials

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