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Daniel Yen

Chartered Semiconductor Manufacturing

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Featured researches published by Daniel Yen.

Archive | 2002

Method of fabricating variable length vertical transistors

Chew-Hoe Ang; Eng Hua Lim; Randall Cher Liang Cha; Jia Zhen Zheng; Elgin Quek; Mei Sheng Zhou; Daniel Yen

Archive | 2003

Method to produce dual gates (one metal and one poly or metal silicide) for CMOS devices using sputtered metal deposition, metallic ion implantation, or silicon implantation, and laser annealing

Chew Hoe Ang; Eng-Hua Lim; Randall Cher Liang Cha; Jia Zhen Zheng; Elgin Quek; Mei-Sheng Zhou; Daniel Yen

Archive | 2002

Method to fabricate a single gate with dual work-functions

Chew Hoe Ang; Eng Hua Lim; Randall Cher Liang Cha; Jia Zhen Zheng; Elgin Quek; Mei Sheng Zhou; Daniel Yen

Archive | 2002

Forming dual gate oxide thickness on vertical transistors by ion implantation

Chew-Hoe Ang; Eng-Hua Lim; Cher-Liang Cha; J. Z. Zheng; Elgin Quek; Mei-Sheng Zhou; Daniel Yen

Archive | 2002

Method to form an asymmetrical non-volatile memory device using small in-situ doped polysilicon spacers

Chew Hoe Ang; Eng Hua Lim; Randall Cher Liang Cha; Jia Zhen Zheng; Elgin Quek; Mei Sheng Zhou; Daniel Yen

Archive | 2001

Method to form high k dielectric and silicide to reduce poly depletion by using a sacrificial metal between oxide and gate

Jia Zhen Zheng; Elgin Quek; Mei Sheng Zhou; Daniel Yen; Chew Hoe Ang; Eng Hua Lim; Randall Cher Liang Cha

Archive | 2003

Adjustable 3D capacitor and method of manufacture

Wei Hua Cheng; Marvin Liao; Chit Hwei Ng; Daniel Yen

Archive | 2002

METHOD OF FORMING SMALL TRANSISTOR GATES BY USING SELF-ALIGNED REVERSE SPACER AS A HARD MASK

Chew Hoe Ang; Eng Hua Lim; Randall Cher Liang Cha; Jia Zhen Zheng; Elgin Quek; Mei Sheng Zhou; Daniel Yen

Archive | 2003

New method of manufacturing variable length vertical transistor

Chew-Hoe Ang; Randall Cher Liang Cha; Eng Hua Lim; Elgin Quek; Daniel Yen; Jia Zhen Zheng; Mei Sheng Zhou; イング・ファ・リム; エルジン・クーク; ジア・ツェン・チェン; ダニエル・エン; チュウ−ホー・アン; メイ・シェン・チョウ; ランドール・チャ

Archive | 2003