Lily L. Pang | Researchain

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Featured researches published by Lily L. Pang.

Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen

Archive | 1999

Gas distribution system for a CVD processing chamber

Tetsuya Ishikawa; Padmanabhan Krishnaraj; Feng Gao; Alan W. Collins; Lily L. Pang

Archive | 2003

Semiconductor wafer support lift-pin assembly

Rudolf Gujer; Thomas K. Cho; Lily L. Pang; Michael P. Karazim; Tetsuya Ishikawa

Archive | 2000

Directing a flow of gas in a substrate processing chamber

Laxman Murugesh; Padmanaban Krishnaraj; Michael S. Cox; Canfeng Lai; Narendra Dubey; Tom K. Cho; Sudhir Gondhalekar; Lily L. Pang

Archive | 2001

Chemical vapor deposition chamber lid assembly

Lily L. Pang; Thomas K. Cho; Tetsuya Ishikawa

Archive | 2010

Cluster tool for leds

Sandeep Nijhawan; Brian H. Burrows; Tetsuya Ishikawa; Olga Kryliouk; Anand Vasudev; Jie Su; David H. Quach; Anzhong Chang; Yuriy Melnik; Harsukhdeep S. Ratia; Son T. Nguyen; Lily L. Pang

Archive | 2007