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Wei-Yung Hsu

Applied Materials

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Publication

Featured researches published by Wei-Yung Hsu.

Archive | 2001

Method for dishing reduction and feature passivation in polishing processes

Wei-Yung Hsu; Liang-Yuh Chen; Ratson Morad; Daniel A. Carl

Archive | 2007

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

Ho Seon Shin; Gary C. Ettinger; Donald J. K. Olgado; Erik C. Wasinger; Sen-Hou Ko; Charles I. Dodds; Yufei Chen; Wei-Yung Hsu

Archive | 2005

Methods and apparatus for processing a substrate

Erik C. Wasinger; Gary C. Ettinger; Sen-Hou Ko; Wei-Yung Hsu; Liang-Yuh Chen; Ho Seon Shin; Donald J. K. Olgado

Archive | 2001

Methods and compositions for chemical mechanical polishing

Wei-Yung Hsu; Gopalakrishna B. Prabhu; Lizhong Sun; Daniel A. Carl

Archive | 2006

Methods and apparatus for cleaning an edge of a substrate

Wei-Yung Hsu; Donald J. K. Olgado; Ho Seon Shin; Liang-Yuh Chen

Archive | 2011

METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CHAMBER CLEANING GAS

Hua Chung; Xizi Dong; Kyawwin Jason Maung; Hiroji Hanawa; Sang Won Kang; David H. Quach; Donald J. K. Olgado; David Bour; Wei-Yung Hsu; Alexander Tam; Anzhong Chang; Sumedh Acharya

Archive | 2008

Methods and apparatus for cleaning a substrate edge using chemical and mechanical polishing

Sen-Hou Ko; Zhenhua Zhang; Yufei Chen; Wei-Yung Hsu

Archive | 2000

METHOD AND APPARATUS FOR ELECTRO-CHEMICAL PROCESSING

Wei-Yung Hsu; Liang-Yuh Chen; Ratson Morad; Daniel A. Carl; Sasson Somekh

Archive | 2003

Web pad design for chemical mechanical polishing

Wei-Yung Hsu; Yutao Ma; Sen-Hou Ko; Daniel A. Carl

Archive | 2004

Integrated multi-step gap fill and all feature planarization for conductive materials

Wei-Yung Hsu; Liang-Yuh Chen; Ratson Morad; Daniel A. Carl; Sasson Somekh

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Collaboration

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Daniel A. Carl

Applied Materials

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Liang-Yuh Chen

Applied Materials

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Sen-Hou Ko

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Ratson Morad

Applied Materials

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Ho Seon Shin

Applied Materials

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Sasson Somekh

Applied Materials

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Yufei Chen

Applied Materials

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Erik C. Wasinger

Applied Materials

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Gary C. Ettinger

Applied Materials

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