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David Trussell

Lam Research

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Publication

Featured researches published by David Trussell.

Archive | 2004

Plasma processor with electrode responsive to multiple RF frequencies

Raj Dhindsa; Felix Kozakevich; David Trussell

Archive | 2003

Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode

Andreas Fischer; William S. Kennedy; Peter Loewenhardt; David Trussell

Archive | 2006

Plasma confinement ring assemblies having reduced polymer deposition characteristics

Rajinder Dhindsa; Felix Kozakevich; James Rogers; David Trussell

Archive | 1997

Method of in-situ cleaning of a chuck within a plasma chamber

Dean R. Denison; William Harshbarger; Anwar Husain; C. Robert Koemtzopoulos; Felix Kozakevich; David Trussell

Archive | 2001

Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2015

Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs

David Trussell; John Daugherty; Michael C. Kellogg; Christopher Pena; Klay Kunkel

Archive | 1997

Plasma chamber with separate process gas and cleaning gas injection ports

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2017

Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ

David Trussell; Alan J. Miller; John Daugherty; Alex Paterson

Archive | 2017

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

John Daugherty; David Trussell; Michael C. Kellogg; Christopher Pena; Klay Kunkel

Archive | 2017

LOAD LOCK INTERFACE AND INTEGRATED POST-PROCESSING MODULE

David Trussell; John Daugherty

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Collaboration

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Felix Kozakevich

Lam Research

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C. Robert Koemtzopoulos

Lam Research

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John Daugherty

Lam Research

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James Rogers

Lam Research

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Rajinder Dhindsa

Lam Research

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Christopher Pena

Lam Research

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Klay Kunkel

Lam Research

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Michael C. Kellogg

Lam Research

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Alan J. Miller

Lam Research

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Alex Paterson

Lam Research

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