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Felix Kozakevich

Lam Research

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Publication

Featured researches published by Felix Kozakevich.

Archive | 1999

Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers

C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 1997

Process for precoating plasma CVD reactors

C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2004

High aspect ratio etch using modulation of RF powers of various frequencies

Camelia Rusu; Rajinder Dhindsa; Eric Hudson; Mukund Srinivasan; Lumin Li; Felix Kozakevich

Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks

Archive | 2004

Plasma processor with electrode responsive to multiple RF frequencies

Raj Dhindsa; Felix Kozakevich; David Trussell

Archive | 2006

Plasma confinement ring assemblies having reduced polymer deposition characteristics

Rajinder Dhindsa; Felix Kozakevich; James Rogers; David Trussell

Archive | 1997

Method of in-situ cleaning of a chuck within a plasma chamber

Dean R. Denison; William Harshbarger; Anwar Husain; C. Robert Koemtzopoulos; Felix Kozakevich; David Trussell

Archive | 1997

Microwave plasma processor

David Pirkle; John Daugherty; Michael Giarratano; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2005

Vacuum plasma processor including control in response to DC bias voltage

Rajinder Dhindsa; Felix Kozakevich; Dave Trussell

Archive | 2006

Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

Rajinder Dhindsa; Eric Lenz; Lumin Li; Felix Kozakevich

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Collaboration

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Rajinder Dhindsa

Lam Research

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David Trussell

Lam Research

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C. Robert Koemtzopoulos

Lam Research

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Dave Trussell

Lam Research

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Lumin Li

Lam Research

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Alexei Marakhtanov

Lam Research

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Camelia Rusu

Lam Research

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Eric Lenz

Lam Research

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Mukund Srinivasan

Lam Research

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Eric Hudson

Lam Research

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