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C. Robert Koemtzopoulos

Lam Research

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Publication

Featured researches published by C. Robert Koemtzopoulos.

Archive | 1999

Method of and apparatus for detecting and controlling in situ cleaning time of vacuum processing chambers

C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 1997

Process for precoating plasma CVD reactors

C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 1997

Method of in-situ cleaning of a chuck within a plasma chamber

Dean R. Denison; William Harshbarger; Anwar Husain; C. Robert Koemtzopoulos; Felix Kozakevich; David Trussell

Archive | 1997

Microwave plasma processor

David Pirkle; John Daugherty; Michael Giarratano; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2001

Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 2009

PROCESS FOR WAFER TEMPERATURE VERIFICATION IN ETCH TOOLS

Keren J. Kanarik; C. Robert Koemtzopoulos; James Rogers; Bi Ming Yen

Archive | 2007

Method for hard mask CD trim

C. Robert Koemtzopoulos; Shibu Gangadharan; Chris Lee; Alan J. Miller

Archive | 1997

Plasma chamber with separate process gas and cleaning gas injection ports

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 1997

Process for cleaning a vacuum processing chamber including the gas injection port

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

Archive | 1997

A method of cleaning a vacuum processing chamber including the gas inlet port

David Trussell; C. Robert Koemtzopoulos; Felix Kozakevich

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Collaboration

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Felix Kozakevich

Lam Research

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David Trussell

Lam Research

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Alan J. Miller

Lam Research

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Anwar Husain

Lam Research

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Bi Ming Yen

Lam Research

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Chris Lee

Lam Research

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David Pirkle

Lam Research

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Dean R. Denison

Lam Research

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James Rogers

Lam Research

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John Daugherty

Lam Research

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