Jie Diao
Applied Materials
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Publication
Featured researches published by Jie Diao.
advanced semiconductor manufacturing conference | 2010
Jie Diao; Garlen C. Leung; Jun Qian; Sean Cui; Anand N. Iyer; Christopher Heung-Gyun Lee; Balaji Chandrasekaran; Thomas H. Osterheld; Lakshmanan Karuppiah
The extension of Moores Law at the 45/32nm nodes is made possible by the introduction of high-k metal gate. In the gate-last scheme to integrate high-k metal gate, planarization and surface topography control have been reported as some of the biggest process challenges. This paper presents a three-platen chemical mechanical planarization process in which fixed abrasive is used on platen 2 and a non-selective slurry is used on platen 3 with a FullVision™ in-situ endpoint system. Superior planarization and dishing performance by the fixed abrasive and consistent endpoint control by FullVision enabled tight control of within wafer, within die and wafer-to-wafer thickness variations that is critical to the success of high k metal gate in high performance logic devices.
Archive | 2008
Robert A. Marks; Christopher Heung-Gyun Lee; Garlen C. Leung; Gregory E. Menk; Jie Diao; Erik S. Rondum
Archive | 2006
Renhe Jia; You Wang; Zhihong Wang; Jie Diao; Daxin Mao; Stan D. Tsai; Lakshmanan Karuppiah; Liang-Yuh Chen
Archive | 2006
Liang-yun Chen; Yuchun Wang; Yan Wang; Alain Duboust; Daniel A. Carl; Ralph M. Wadensweiler; Manoocher Birang; Paul D. Butterfield; Rashid Mavliev; Stan D. Tsai; You Wang; Jie Diao; Renhe Jia; Lakshmanan Karuppiah; Robert A. Ewald
Archive | 2007
Daxin Mao; You Wang; Junzi Zhao; Stan D. Tsai; Renhe Jia; Jie Diao; Yongqi Hu; Lakshmanan Karuppiah
Archive | 2006
You Wang; Renhe Jia; Stan D. Tsai; Yongqi Hu; Zhihong Wang; Jie Diao; Gerald John Alonzo
Archive | 2006
You Wang; Stan D. Tsai; Lakshmanan Karuppiah; Jie Diao; Renhe Jia; Alpay Yilmaz
Archive | 2006
Renhe Jia; Jie Diao; Stan D. Tsai; You Wang; Lakshmanan Karuppiah
208th ECS Meeting | 2006
Renhe Jia; You Wang; Zhihong Wang; Stan D. Tsai; Jie Diao; Daxin Mao; Laksh Karuppiah; Liang-Yuh Chen
Archive | 2006
You Wang; Jie Diao; Stan D. Tsai; Lakshmanan Karuppiah